| XIONG Li-wei,CUI Xiao-hui,WANG Jian-hua,GONG Guo-hua,ZOU Wei.Influence of Borane Concentration on the Boron-doping of Nano-crystalline Diamond Films[J],43(3):6-9,24 |
| Influence of Borane Concentration on the Boron-doping of Nano-crystalline Diamond Films |
| Received:February 16, 2014 Revised:March 27, 2014 |
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| DOI： |
| KeyWord:nano-crystalline diamond film doping boron boron concentration chemical vapor deposition |
| Author | Institution |
| XIONG Li-wei |
School of Materials Science and Engineering, Wuhan Institute of Technology, Wuhan , China;Hubei Provincial Key Laboratory of Plasma Chemistry & Advanced Materials, Wuhan , China |
| CUI Xiao-hui |
School of Materials Science and Engineering, Wuhan Institute of Technology, Wuhan , China;Hubei Provincial Key Laboratory of Plasma Chemistry & Advanced Materials, Wuhan , China |
| WANG Jian-hua |
School of Materials Science and Engineering, Wuhan Institute of Technology, Wuhan , China;Hubei Provincial Key Laboratory of Plasma Chemistry & Advanced Materials, Wuhan , China |
| GONG Guo-hua |
School of Materials Science and Engineering, Wuhan Institute of Technology, Wuhan , China;Hubei Provincial Key Laboratory of Plasma Chemistry & Advanced Materials, Wuhan , China |
| ZOU Wei |
School of Materials Science and Engineering, Wuhan Institute of Technology, Wuhan , China;Hubei Provincial Key Laboratory of Plasma Chemistry & Advanced Materials, Wuhan , China |
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| Abstract: |
| Objective In order to study the intrinsic mechanism of doping borane during the growth of nano-crystalline diamond films to achieve precise control of the process. Methods Nano-crystalline diamond ( NCD) films were boron doped by the microwave plasma enhanced chemical vapor deposition ( MPCVD) method using hydrogen diluted di-borane as boron source. The influences of borane concentration on grain size, surface roughness, surface resistance and boron atom concentration of boron-doped NCD films were investigated. Results The surface roughness and grain size of nanocrystalline diamond films increased with increasing concentrations of boron source. The surface resistance first showed a downward trend with increasing boron concentrations, and then gradually reached equilibrium. Conclusion The results showed that doping of boron could improve the surface conductivity performance of nano-crystalline diamond films and increase its surface roughness and grain size. By comprehensive comparison, the optimal borane concentration was 0. 02% under the doping condition of 700 ℃ and 15 min. |
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