| DING Yue,LU Jian-shu.Investigation of Micro / Nano Structure Formation on Mono-crystalline Silicon with Cu2+ Catalysis[J],43(2):100-104,149 |
| Investigation of Micro / Nano Structure Formation on Mono-crystalline Silicon with Cu2+ Catalysis |
| Received:October 30, 2013 Revised:November 18, 2013 |
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| DOI： |
| KeyWord:silicon substrate micro / nano structure copper ion solar cells |
| Author | Institution |
| DING Yue |
Investigation of Micro / Nano Structure Formation on Mono-crystalline Silicon with Cu2+ CatalysisMaterials and Chemistry Laboratory,Zhejiang University of Technology, Hangzhou , China |
| LU Jian-shu |
Investigation of Micro / Nano Structure Formation on Mono-crystalline Silicon with Cu2+ CatalysisMaterials and Chemistry Laboratory,Zhejiang University of Technology, Hangzhou , China |
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| Abstract: |
| Objective To prepare micro / nano structure on silicon substrate combining with the mechanism of metal-assisted chemical etching in silicon. Methods Various micro-nano structures were prepared with Cu2+ catalysis using monocrystalline silicon as sample substrate. And the formation mechanism of micro / nano structures, the reaction phenomenon and the main influencing factors were studied. The resulted microstructure, and surface morphology were revealed by scanning electron microscope and atomic force microscope. Results The reflectivity of the structure was less than 5% from 250 nm to 800 nm characterized by ultraviolet spectrophotometer. Conclusion Cu2+ catalytic etching monocrystalline silicon could be used as a potential technology for silicon texture formation because of the lower reflectance and easier handling compared with traditional alkine etching. |
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