| XIONG Xiao-chen,YAN Nu,HAN Xiao-qi.Influence of Magnetron Sputtering Parameters on Surface Properties of TiN-coated Bearing Steel[J],43(1):67-70,89 |
| Influence of Magnetron Sputtering Parameters on Surface Properties of TiN-coated Bearing Steel |
| Received:October 29, 2013 Revised:November 02, 2013 |
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| DOI： |
| KeyWord:magnetron sputtering TiN film bearing Steel hardness wearing resistance |
| Author | Institution |
| XIONG Xiao-chen |
Hubei Key Laboratory of Hydroelectric Machinery Design & Maintenance, China Three Gorges University,Yichang , China; Collaborative Innovation Center for Energy Equipment of Three Gorges Region, China Three Gorges University, Yichang , China |
| YAN Nu |
Hubei Key Laboratory of Hydroelectric Machinery Design & Maintenance, China Three Gorges University,Yichang , China; Collaborative Innovation Center for Energy Equipment of Three Gorges Region, China Three Gorges University, Yichang , China |
| HAN Xiao-qi |
Hubei Key Laboratory of Hydroelectric Machinery Design & Maintenance, China Three Gorges University,Yichang , China; Collaborative Innovation Center for Energy Equipment of Three Gorges Region, China Three Gorges University, Yichang , China |
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| Abstract: |
| Objective To investigate the influence of magnetron sputtering parameters including sputtering power and sputtering time on surface properties. Methods The hardness tests and friction tests were carried out for TiN-coated bearing steel. Results Tests showed that hardness and wear resistance declined with the increase of deposition time, and when the sputtering power was 200 W, with a deposition time of 5 ~ 10 minutes, the hardness value reached 345. 23 ~ 353. 88 HV, and the wearing capacity was 2. 9 ~ 3. 4 mg; The hardness and wear resistance declined with the increase of sputtering power in the range of 70 ~ 200 W, the hardness value reached up to 577. 91 HV, and the wearing capacity was 0. 9 mg, when the deposition time was 30 minutes. Conclusion It was concluded from the testing results that the sputtering power was the predominant influencing factor. In order to improve the surface friction properties and hardness for bearing steels, the sputtering power should not be too high, and a sputteringpower of 100 W and a deposition time of 30 minutes was the most suitable sputtering condition. |
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