| WEI Yong-qiang,ZHANG Yan-xia,WEN Zhen-hua,JING Zhi-qiang,FEN Xian-zhang.Effects of Different Pulsed Bias Duty Cycle on the Microstructure and Hardness of TiN / TiAlN Multilayer Coatings[J],43(1):1-6,39 |
| Effects of Different Pulsed Bias Duty Cycle on the Microstructure and Hardness of TiN / TiAlN Multilayer Coatings |
| Received:October 22, 2013 Revised:November 22, 2013 |
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| DOI： |
| KeyWord:TiN/TiAlN arc ion plating nanohardness microstructure pulsed bias duty cycle |
| Author | Institution |
| WEI Yong-qiang |
Scool of Mechatronics Engineering, Zhengzhou Institute of Aeronautical Industry Management, Zhengzhou , China;Engineering Technology Research Center of Aviation Manufacturing & Equipment, University of Henan Province, Zhengzhou 50015, China |
| ZHANG Yan-xia |
School of Mechatronics Engineering, Zhengzhou Vocational University of Information and Technology, Zhengzhou , China |
| WEN Zhen-hua |
Scool of Mechatronics Engineering, Zhengzhou Institute of Aeronautical Industry Management, Zhengzhou , China;Engineering Technology Research Center of Aviation Manufacturing & Equipment, University of Henan Province, Zhengzhou 50015, China |
| JING Zhi-qiang |
Schol of Mechatronics Engineering, Zhengzhou Institute of Aeronautical Industry Management, Zhengzhou , China;Engineering Technology Research Center of Aviation Manufacturing & Equipment, University of Henan Province, Zhengzhou 50015, China |
| FEN Xian-zhang |
Schol of Mechatronics Engineering, Zhengzhou Institute of Aeronautical Industry Management, Zhengzhou , China;Engineering Technology Research Center of Aviation Manufacturing & Equipment, University of Henan Province, Zhengzhou 50015, China |
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| Abstract: |
| Objective To study the effects of pulsed bias duty cycle on the microstructure and hardness of TiN / TiAlN multilayer coatings. Methods Five TiN / TiAlN multilayer coatings with different pulsed bias duty cycle were deposited by the pulse biased arc ion plating method on M2 high speed steel substrates, and the microstructure, composition, phase structure and hardness of the multilayer coatings were investigated. Results TiN / TiAlN multilayer coatings surface exhibited a typical growth morphology prepared by arc ion plating. The amount of macroparticles was significantly reduced with increasing pulsed bias duty cycle. The increase of pulsed bias duty cycle also caused the decrease of Al / Ti atomic ratio in the multilayer coatings. Conlusion TiN / TiAlN multilayer coatings preferred (111) orientation growth, and meanwhile contained (311) , (222) and (200) crystallographic structure. The nanohardness of five multilayer coatings was higher than 33 GPa. At 20% pulsed bias duty cycle, the super hard coatings were prepared. |
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