| LI Xin-ling,ZHOU Zhi-nan,SUN Wei-lian,SUN Bo,WANG Hui-qiang,AN Guang.Effect of Nitrogen Flow on the Chromaticity Properties of ZrN / Zr Thin Films[J],42(3):13-15,41 |
| Effect of Nitrogen Flow on the Chromaticity Properties of ZrN / Zr Thin Films |
| Received:December 26, 2012 Revised:January 14, 2013 |
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| DOI： |
| KeyWord:nitrogen flow ZrN / Zr thin films chromaticity deposition rate mid-frequency twin-targets |
| Author | Institution |
| LI Xin-ling |
Mechanical & Electronic Engineering College, Agriculture University of Hebei, Baoding , China;Light Metal of Alloy Material Engineering Centre in Hebei Province, Baoding , China |
| ZHOU Zhi-nan |
Modern Education and Technology Centre, Agriculture University of Hebei, Baoding , China |
| SUN Wei-lian |
Mechanical & Electronic Engineering College, Agriculture University of Hebei, Baoding , China;Light Metal of Alloy Material Engineering Centre in Hebei Province, Baoding , China |
| SUN Bo |
Mechanical & Electronic Engineering College, Agriculture University of Hebei, Baoding , China |
| WANG Hui-qiang |
Mechanical & Electronic Engineering College, Agriculture University of Hebei, Baoding , China;Light Metal of Alloy Material Engineering Centre in Hebei Province, Baoding , China |
| AN Guang |
Mechanical & Electronic Engineering College, Agriculture University of Hebei, Baoding , China |
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| Abstract: |
| The ZrN / Zr films were deposited on stainless steel and aluminum substrates by mid-frequency twin-targets magnetron sputtering technology. The thickness, chromaticity, and surface morphology of ZrN / Zr films were characterized. And the influences of nitrogen flow on deposition rate and chromaticity of ZrN / Zr films were studied. The results show that the deposition rate decreases first with the increase of nitrogen flow, then increases. Nitrogen flow between 2 . 5 X 10-10and 3 . 5 X 10-10m3/ s, the influence of nitrogen flow on deposition rate is very small . With the increase of nitrogen flow, the color of the film changes regularly. In the range of 2 . 5 X10-10~ 3 . 5 X10-10m3/ s, the gold ZrN films are bright and density. |
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