| ZHU Wen,RAN Chun-hua,JIN Yi-dong,NIE Chao-yin,WANG Zhen-lin.The Effect of Ti Content on Mechanical Properties of DLC Films[J],(5):7-10 |
| The Effect of Ti Content on Mechanical Properties of DLC Films |
| Received:June 15, 2012 Revised:October 20, 2012 |
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| DOI： |
| KeyWord:unbalanced magnetron sputtering Ti-DLC cohesion tribological and wear properties |
| Author | Institution |
| ZHU Wen |
School of Materials Science and Engineering, Southwest University, Chongqing , China |
| RAN Chun-hua |
School of Materials Science and Engineering, Southwest University, Chongqing , China |
| JIN Yi-dong |
School of Materials Science and Engineering, Southwest University, Chongqing , China |
| NIE Chao-yin |
School of Materials Science and Engineering, Southwest University, Chongqing , China |
| WANG Zhen-lin |
School of Materials Science and Engineering, Southwest University, Chongqing , China |
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| Abstract: |
| Using unbalanced magnetron sputtering technique, diamond-like carbon films with different titanium contents(Ti-DLC)were deposited on stainless steel substrates by changing Ti target supttering current. Investigated the influences of Ti content on microhardness, elastic modulus, film-substrate cohesion, fracture toughness, friction and wear behavior of films. Results showed that the hardness of the Ti-DLC films increases obviously compared with the pure DLC films. In the meantime, the hardness of the Ti-DLC films increases first and then decreases with the increase of the Titarget sputtering current and reaches the highest when Ti target sputtering current is increased to 1.5A. Film-substrate cohesion and fracture toughness of the films are improved by depositing some Ti. The friction coefficient of DLC films decreases significantly with the deposition of Ti. |
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