| LI Ming,MI Yi-ming,YAN Zhi,JI Xin.The Effect of Target-substrate Distance on Transparent Conductive Films by Pulsed Laser Deposition on Flexible Substrates[J],(4):55-59 |
| The Effect of Target-substrate Distance on Transparent Conductive Films by Pulsed Laser Deposition on Flexible Substrates |
| Received:April 24, 2012 Revised:August 20, 2012 |
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| DOI： |
| KeyWord:pulsed laser deposition flexible substrate transparent conductive oxide Sn:InO Al:ZnO In:ZnO |
| Author | Institution |
| LI Ming |
College of Material Engineering, Shanghai University of Engineering Science, Shanghai , China |
| MI Yi-ming |
College of Fundamental Studies, Shanghai University of Engineering Science, Shanghai , China |
| YAN Zhi |
College of Material Engineering, Shanghai University of Engineering Science, Shanghai , China |
| JI Xin |
College of Fundamental Studies, Shanghai University of Engineering Science, Shanghai , China |
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| Abstract: |
| By pulsed laser deposition method, target-substrate distance were controlled with 4,6,8 cm respectively. Thin films of indium zinc oxide, indium tin oxide and aluminum doped ZnO were deposited on polyethylene terephthalate substrate, the effect of the film electrical, optical, morphological and structural characteristics on target-substrate distance was studied. The research results show that optical transmittance of TCO thin films deposited by 6~8 cm target-substrate distance is more than 90% in the visible range, the resistivity is about 5×10-4Ω·cm; In addition to these excellent electrical and the optical properties, the films deposited by 8 cm target-substrate distance is uniform, smooth, good attached, and no cracks or any other extended defects, applied in optoelectronic devices. |
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