| QIU Jia-wen,ZHAO Dong-cai.A Review of Vacuum Arc Deposition and Its Application in Hardness Films[J],(2):93-98 |
| A Review of Vacuum Arc Deposition and Its Application in Hardness Films |
| Received:January 26, 2011 Revised:April 20, 2012 |
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| DOI： |
| KeyWord:vacuum arc deposition(VAD) hardness film nitride film a-Cfilm oxide film |
| Author | Institution |
| QIU Jia-wen |
China Academy of Space Technology, Beijing , China |
| ZHAO Dong-cai |
Science and Technology on Surface Engineering Laboratory, Lanzhou Institute of Physics, Lanzhou , China |
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| Abstract: |
| The progress of vacuum arc deposition has been discussed from arc mode of operation and the technology of macroparticles filter, and then, the application and progress in hardness films, such as ta-C,CNx,nitride,oxide and advanced films, have been described. The aim of this paper is providing a reference in vacuum arc deposition and its application for researchers in our nation. |
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