| ZHANG Ling,LAI Qi-bang,CUI Wan-guo,WANG Fu-ming.New Method for Analyzing Raman Spectra of Hydrogen-free Diamond-like Carbon Films[J],39(4):103-105 |
| New Method for Analyzing Raman Spectra of Hydrogen-free Diamond-like Carbon Films |
| Received:April 05, 2010 Revised:August 10, 2010 |
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| DOI： |
| KeyWord:DLC Raman spectra sp3 content G peak |
| Author | Institution |
| ZHANG Ling |
Physics Department of Xiamen University, Xiamen , China |
| LAI Qi-bang |
Physics Department of Xiamen University, Xiamen , China |
| CUI Wan-guo |
Physics Department of Xiamen University, Xiamen , China |
| WANG Fu-ming |
Physics Department of Xiamen University, Xiamen , China |
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| Abstract: |
| The ratio between intensities of the D peak and the G peak(ID/ IG)is used to estimate sp3 content of the DLC films. However, this method has limitations. When sp3 content exceeds 20%, ID/ IGhas very low correlations with the content of sp3, therefore,estimation of sp3 content using this method could lead to significant error.DC-magne-tron sputtering and multiple-arc ion plating are used to deposit a series of hydrogen-free diamond-like carbon samples. Raman spectra and Vickers hardness of samples were measured and analyzed. A strong correlation between the hardness and G-peak's full width at half maximum(FWHM)was discovered. The results show that it's feasible to measure the content of sp3 by using the G-peak's FWHM in Raman spectra. |
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