| ZENG Ying-ying,AI Yong-ping.Preparation and Applications of Cu-W(Mo)Thin Films[J],39(3):90-93 |
| Preparation and Applications of Cu-W(Mo)Thin Films |
| Received:March 17, 2010 Revised:June 10, 2010 |
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| DOI： |
| KeyWord:Cu-W(Mo)thin film sputtering thermal management |
| Author | Institution |
| ZENG Ying-ying |
Jinggangshan University, Jian , China |
| AI Yong-ping |
Jinggangshan University, Jian , China |
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| Abstract: |
| The preparation methods of Cu-W(Mo)thin films have been introduced in the recent years, including sputter deposition, ion beam assisted deposition,ion beam mixing,electron beam evaporation.It highlighted the magnetron sputtering and ion beam sputtering deposition method in sputtering method, simply analyzed the structural characteristics of thin film and applications of solid lubricants, electronic devices, surface modification of materials, prospected for future research and application prospects and pointed out the heat-removing material was the mainstream of Cu-W (Mo)thin film in the future. |
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