| YANG Qiong,WANG Chuan-bin,ZHANG Song,ZHANG Dong-ming,SHEN Qiang,ZHANG Lian-meng.Effects of Deposition Temperature and Annealing on Structure of BCN Thin Films[J],39(1):63-66 |
| Effects of Deposition Temperature and Annealing on Structure of BCN Thin Films |
| Received:September 18, 2009 Revised:February 10, 2010 |
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| DOI： |
| KeyWord:BCN thin films Deposition temperature Annealing Pulsed laser deposition |
| Author | Institution |
| YANG Qiong |
State Key Laboratory of Advanced Technology for Materials Synthesis and Processing,Wuhan University of Technology, Wuhan , China |
| WANG Chuan-bin |
State Key Laboratory of Advanced Technology for Materials Synthesis and Processing,Wuhan University of Technology, Wuhan , China |
| ZHANG Song |
State Key Laboratory of Advanced Technology for Materials Synthesis and Processing,Wuhan University of Technology, Wuhan , China |
| ZHANG Dong-ming |
State Key Laboratory of Advanced Technology for Materials Synthesis and Processing,Wuhan University of Technology, Wuhan , China |
| SHEN Qiang |
State Key Laboratory of Advanced Technology for Materials Synthesis and Processing,Wuhan University of Technology, Wuhan , China |
| ZHANG Lian-meng |
State Key Laboratory of Advanced Technology for Materials Synthesis and Processing,Wuhan University of Technology, Wuhan , China |
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| Abstract: |
| BCN thin films were deposited on Si(100)substrates by pulsed laser deposition. The effects of deposition temperature and annealing on the film composition and structure were investigated.Fourier-transform infrared(FT-IR)spectroscopy and X-ray photoelectron spectroscopy(XPS)were used to characterize the BCN thin films. The results show that deposition temperatures have little influence on film composition. FTIR and XPS analyses indicated the as-deposited BCN films contained B— C, N— C and B— N chemical bonds with B— C— N atomic hybridization.BCN thin films which annealed in vacuum at 700℃ were stable.When annealed in air, the samples were oxidated. Meanwhile, the formation of C≡ N bond indicated that it has better thermal stability. |
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