| YANG Juan,NIE Chao-yin,CHEN Zhi-qian,XIE Hong-mei,WEN Xiao-xia,LU Chun-chan.The Influences of Bias on the Microstructure and Mecharucal Properties of CrNx Films Prepared by Cathodic Arc Evaporation[J],37(3):22-24 |
| The Influences of Bias on the Microstructure and Mecharucal Properties of CrNx Films Prepared by Cathodic Arc Evaporation |
| Received:March 29, 2008 Revised:June 10, 2008 |
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| DOI： |
| KeyWord:CrNx coatings Surface morghology Phase structue Microhardness Tribological property Cathodic arcevaporation Stainless steel, Bias |
| Author | Institution |
| YANG Juan |
School of Materials Science And Engineering, Southwest University, Chongqing , China |
| NIE Chao-yin |
School of Materials Science And Engineering, Southwest University, Chongqing , China |
| CHEN Zhi-qian |
School of Materials Science And Engineering, Southwest University, Chongqing , China |
| XIE Hong-mei |
School of Materials Science And Engineering, Southwest University, Chongqing , China |
| WEN Xiao-xia |
School of Materials Science And Engineering, Southwest University, Chongqing , China |
| LU Chun-chan |
School of Materials Science And Engineering, Southwest University, Chongqing , China |
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| Abstract: |
| In the present study, CrNx films were deposited by using cathodic arc ion evaporation technique using stainless steel as subsrate. The surface morghology, the mechanical and tribological properties of CrNx films obtained under various biases were examined by various standard characterization techniques and equipments, such as field scanning electronic microscopy, X-ray diffraction, ball-on-disc friction tester, microindention system and so on. With the increase of the substrate bias, the number of macroparticles, the thickness and the deposition rate decrease, the surfaces of the films become smoother and smoother, the sizes of the crystalline grains increase, and the texture of the CrNx films changes significantly. The CrNx coatings with - 100V sample bias exhibits the densest surface structure, well development crystalline grain, apparent hardness enhancement and good wear resistance. |
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