| WU Ying,WU Xin-wei,LI Guang-ze,LI Ge-yang.Microstructure and Mechanical Properties of Reactively Sputtered Ti( O, N) Coatings[J],36(6):39-41 |
| Microstructure and Mechanical Properties of Reactively Sputtered Ti( O, N) Coatings |
| Received:July 23, 2007 Revised:December 10, 2007 |
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| DOI： |
| KeyWord:Reactive magnetron sputtering Ti( O , N) coating Microstructure Mechanical properties |
| Author | Institution |
| WU Ying |
State Key Lab. of Metal Matrix Composites, Shanghai Jiaotong University, Shanghai , China |
| WU Xin-wei |
State Key Lab. of Metal Matrix Composites, Shanghai Jiaotong University, Shanghai , China |
| LI Guang-ze |
State Key Lab. of Metal Matrix Composites, Shanghai Jiaotong University, Shanghai , China |
| LI Ge-yang |
State Key Lab. of Metal Matrix Composites, Shanghai Jiaotong University, Shanghai , China |
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| Abstract: |
| A series of Ti( O , N) coatings with different oxygen content were deposited by the reactive magnetron sputtering method in a gaseous mixture of Ar, N2 and 02. Energy dispersive spectroscopy, X-ray diffraction, scanning electron microscopy, atomic force microscopy and nanoindentation were employed to investigate the effects of oxygen partial pressure on chemical composition , microstructure and corresponding mechanical properties of Ti( O, N) coatings. Experimental results shows that with the increase of oxygen partial pressure, the oxygen content gradually increase in coatings and the nitrogen content decreased correspondingly. During the process, these coatings retained a similar NaCl structure as TiN. Addition of a small amount of oxygen improves the crystallization of the coatings and enhances the hardness which is obviously higher than that of TiN coating. The maximum hardness of coatings is 26. 2 GPa at 8. 0 at.% O. Further increasing the oxygen content, the hardness of coatings keeps high hardness. |
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