| ZHANG Bi-yun,QU Yan-qing,XIE Hong-mei,NIE Chao-yin.Review of Preparation and Application of Diamond-Iike Carbon Films[J],36(3):70-73 |
| Review of Preparation and Application of Diamond-Iike Carbon Films |
| Received:October 31, 2006 Revised:June 10, 2007 |
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| DOI： |
| KeyWord:DLC Film Preparation Application Deposition process |
| Author | Institution |
| ZHANG Bi-yun |
Materials Science and Engineering College of Southwest University, Chongqing , China |
| QU Yan-qing |
Materials Science and Engineering College of Southwest University, Chongqing , China |
| XIE Hong-mei |
Materials Science and Engineering College of Southwest University, Chongqing , China |
| NIE Chao-yin |
Materials Science and Engineering College of Southwest University, Chongqing , China |
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| Abstract: |
| The structure of the diamond-like carbon( DLC) film is briefly discussed. The conventional preparation methods of DLC films and their basic principles, the merits and defects were reviewed. Some new preparation methods which were developing recently were introduced. Compared with the conventional methods, it can increase the deposition speed and quality. The applications of the films in the fields of machinery, electronics, optics, medicine and aviation, etc were summarized. And point out, with the developing of the technology of the DLC , it will exploit the particular advantages in more and more fields. |
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