| FAN Li-mei,WEN Jiu-ba,ZHAO Sheng-li,ZHU Yao-min.Chemical Etching on Single-crystalline Silicon Slice and its Surface Morphology[J],36(1):19-21 |
| Chemical Etching on Single-crystalline Silicon Slice and its Surface Morphology |
| Received:October 13, 2006 Revised:February 10, 2007 |
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| DOI： |
| KeyWord:Chemical etching Single-crystalline silicon slice Surface morphology |
| Author | Institution |
| FAN Li-mei |
School of Materials Science and Engineering, Henan University of Science and Technology, Luoyang , China |
| WEN Jiu-ba |
School of Materials Science and Engineering, Henan University of Science and Technology, Luoyang , China |
| ZHAO Sheng-li |
School of Materials Science and Engineering, Henan University of Science and Technology, Luoyang , China |
| ZHU Yao-min |
School of Materials Science and Engineering, Henan University of Science and Technology, Luoyang , China |
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| Abstract: |
| Acid-etching and alkali-etching methods are used to etch on single-crystalline silicon slice and the influence of temperature, time and solution concentration on the surface morphology is explored. The results show that at 20℃ the porosites etched by 2.81MHF+18.81M HNO3 for 2 minutes, and 2.67M HF+17.85M HNO3 for 15 minutes are well-proportioned. The textures obtained at 50℃ by 33% KOH with reaction for10 minutes have good surface morphology. |
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