| LIU Chaoping,MENG Bin,YUAN Qilong,WANG Yuezhong,SONG Hui,SUN Peng,SHANG Peng,LI He,JIANG Nan,KAZUHITO Nishimura.Research Progress of Anti-reflection Technology on Diamond Surface[J],54(9):1-17 |
| Research Progress of Anti-reflection Technology on Diamond Surface |
| Received:October 31, 2024 Revised:February 18, 2025 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2025.09.001 |
| KeyWord:diamond optical window anti-reflection film microstructure refractive index transmittance |
| Author | Institution |
| LIU Chaoping |
School of Materials Science and Engineering, Kunming University of Science and Technology, Kunming , China;State Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo , China |
| MENG Bin |
School of Materials Science and Engineering, Kunming University of Science and Technology, Kunming , China |
| YUAN Qilong |
State Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo , China |
| WANG Yuezhong |
State Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo , China |
| SONG Hui |
State Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo , China |
| SUN Peng |
Tianjin Key Laboratory of Optical Thin Films, Tianjin Jinhang Technical Physics Institute, Tianjin , China |
| SHANG Peng |
GRINM Guojing Advanced Materials Co., Ltd., Hebei Langfang , China |
| LI He |
State Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo , China |
| JIANG Nan |
State Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo , China |
| KAZUHITO Nishimura |
State Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo , China |
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| Abstract: |
| With exceptional thermal conductivity, wear resistance, and chemical stability, diamond exhibits excellent optical transmittance across a broad spectrum from 0.3 to 2.5 μm and over 6 μm. Consequently, it is considered an ideal material for high-power laser output windows and infrared optical windows. However, due to the high refractive index (n=2.42), the surface reflection loss is high on diamonds, which leads to the actual transmittance of diamonds falling short of theoretical expectations. Therefore, the high surface reflection restricts the application and prevalence of diamond as an optical window material. Coating anti-reflection film and constructing anti-reflection microstructure on diamond surfaces are two effective methods to improve diamond transmittance. Firstly, the basic principles of the two diamond transmittance enhancement methods are introduced. The anti-reflection film on the diamond surface makes the reflected light on the diamond surface interfere and cancel each other by adjusting the composition, thickness, and structure of the film, to achieve the anti-reflection effect. On the other hand, the anti-reflection microstructure forms a subwavelength microstructure on the diamond surface, which can not be distinguished by incident light, and the structure layer can be equivalent to a graded refractive index film, which can reduce the reflection caused by the sudden change of refractive index and achieve anti-reflection effect. Then, the common preparation methods of anti-reflection film and anti-reflection microstructure on the diamond surface are described. The deposition methods of the anti-reflection film are classified into physical and chemical vapor deposition, mainly including evaporation, magnetron sputtering and chemical vapor deposition (CVD), and the preparation methods of anti-reflection microstructure include silicon replication, laser processing, and ion etching and the advantages and disadvantages of the above preparation methods are also summarized. Then, the research progress of the two transmittance enhancement methods is further discussed, and the transmittance enhancement effects of the two methods are reviewed. The effects of single-layer, double-layer, and multi-layer antireflection films and anti-reflection microstructure on the transmittance of diamonds are analyzed in detail. The single-layer anti-reflection film can achieve transmission in a fixed wavelength band, and the double-layer anti-reflection film can further enhance the transmittance in the target wavelength band, but the transmittance on both sides of the target wavelength band is not as effective as that of the single-layer film. The multi-layer anti-reflection film can achieve high transmittance, wide band transmission, and wide angle of incidence, and has the best anti-reflection effect, but with the increase of the number of layers, the problem of poor adhesion between the film systems becomes more and more serious, and the performance of multi-layer anti-reflection transmission film will be seriously limited. The anti-reflection microstructure also has the advantages of a good anti-reflection effect and wide anti-reflection band, but it is difficult to process and the actual optical transmittance is low. Therefore, increasing the adhesion between the multi-layer anti-reflection film system and accurately processing the designed anti-reflection microstructure will be key development directions in the future. At present, based on the anti-reflection film and anti-reflection microstructure technology, the optical transmittance of diamonds has been effectively improved, but many problems need to be solved to realize the practical application of diamonds in optical windows and other fields, including the preparation process, performance, durability, and damage resistance of anti-reflection film and anti-reflection microstructure, so the path to optimization is still challenging. Therefore, optimizing the preparation process, improving the adhesion and stability of the anti-reflection film system, and enhancing the actual transmittance of the anti-reflection microstructure are the key development trends of diamond anti-reflection research in the future. |
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