| ZHU Yuguang,WANG Zirui,MA Fuhui,MEI Lu,WANG Zhengyi,WANG Yongguang.Effect of pH on Nano-tribochemical Behavior in ChemicalMechanical Polishing of Aluminum Alloy[J],54(2):173-181, 221 |
| Effect of pH on Nano-tribochemical Behavior in ChemicalMechanical Polishing of Aluminum Alloy |
| Received:March 21, 2024 Revised:August 31, 2024 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2025.02.014 |
| KeyWord:aluminum alloy chemical mechanical polishing nanotribology pH value attraction force adhesion force |
| Author | Institution |
| ZHU Yuguang |
Engineering Training Center,Jiangsu Suzhou , China |
| WANG Zirui |
School of Mechanical and Electric Engineering, Soochow University,Jiangsu Suzhou , China |
| MA Fuhui |
Engineering Training Center,Jiangsu Suzhou , China |
| MEI Lu |
Engineering Training Center,Jiangsu Suzhou , China |
| WANG Zhengyi |
Engineering Training Center,Jiangsu Suzhou , China |
| WANG Yongguang |
School of Mechanical and Electric Engineering, Soochow University,Jiangsu Suzhou , China |
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| Abstract: |
| In order to investigate the nano-tribochemical behavior in chemical mechanical polishing (CMP) of aluminum alloy, characterize the thickness and mechanical properties of the surface film formed by the CMP solution, and analyze the contact state and tribochemical characteristics of single abrasive particle in CMP. |
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