| ZHOU Yihao,CHEN Wengang,CHENG Jiahao,GUO Siliang,WEI Beichao,YUAN Haoen,Dongyang，Li.Effect of Laser Texture Shape Spacing on Friction and Wear Characteristics of Monocrystalline Silicon[J],53(11):127-139 |
| Effect of Laser Texture Shape Spacing on Friction and Wear Characteristics of Monocrystalline Silicon |
| Received:September 22, 2023 Revised:December 26, 2023 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2024.11.011 |
| KeyWord:micro-texturing single crystal silicon frictional wear laser processing friction coefficient wear rate frictional heating |
| Author | Institution |
| ZHOU Yihao |
College of Mechanical and Transportation, Southwest Forestry University, Kunming , China;Academician Dongyang Li Workstation in Yunnan Province, Kunming , China |
| CHEN Wengang |
College of Mechanical and Transportation, Southwest Forestry University, Kunming , China;Academician Dongyang Li Workstation in Yunnan Province, Kunming , China |
| CHENG Jiahao |
College of Mechanical and Transportation, Southwest Forestry University, Kunming , China;Academician Dongyang Li Workstation in Yunnan Province, Kunming , China |
| GUO Siliang |
College of Mechanical and Transportation, Southwest Forestry University, Kunming , China;Academician Dongyang Li Workstation in Yunnan Province, Kunming , China |
| WEI Beichao |
College of Mechanical and Transportation, Southwest Forestry University, Kunming , China;Academician Dongyang Li Workstation in Yunnan Province, Kunming , China |
| YUAN Haoen |
College of Mechanical and Transportation, Southwest Forestry University, Kunming , China;Academician Dongyang Li Workstation in Yunnan Province, Kunming , China |
| Dongyang，Li |
Academician Dongyang Li Workstation in Yunnan Province, Kunming , China;Department of Chemical and Materials Engineering, University of Alberta, Alberta Edmonton T6G 2H5, Canada |
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| Abstract: |
| The primary objective of this research is to enhance the friction and wear resistance of single-crystal silicon materials, which hold significant importance in various technological applications. However, the practical use of single-crystal silicon is limited due to its susceptibility to wear, prompting continuous efforts by scholars both domestically and internationally to seek improvements. This study aims to provide an effective method for improving the tribological performance of single- crystal silicon. Given that ultraviolet laser processing technology can offer high processing precision and accuracy, this research chooses to use ultraviolet laser technology to create textures on the surface of single-crystal silicon to ensure experimental consistency and repeatability. To investigate the tribological performance of single-crystal silicon samples with different texture parameters, dry sliding tests were conducted with an MRTR-1 friction and wear test machine under standard atmospheric conditions at room temperature. The instantaneous friction coefficients of single-crystal silicon textured samples recorded by the experimental instrument were of vital importance for analyzing how texture influences friction and wear behavior. To gain deeper insights into the structural changes and wear patterns induced by surface texturing, optical microscopy, scanning electron microscopy (SEM), and X-ray energy-dispersive spectroscopy (EDS) were employed to examine the macro and micro wear morphology of single-crystal silicon textured samples, as well as the elemental composition and distribution state. This multi-faceted approach is aided in analyzing the impact of texture on the tribological properties of single-crystal silicon from a different perspective. Furthermore, an electronic balance was used to measure the mass of the single-crystal silicon textured samples before and after friction and wear tests, and the wear rate was calculated using relevant formulas. This quantified the contribution of surface texture to reduce the wear of single-crystal silicon, making the results more intuitive. On the other hand, the study also utilized Ansys finite element software for simulation and analysis. To understand the surface stress distribution and the magnitude and distribution of frictional heating temperature of single-crystal silicon textured samples, finite element simulation methods were employed to elucidate the role of surface texture in improving the tribological performance of single-crystal silicon from both a structural and heat dissipation perspective. After a series of experiments and analyses as described above, the following conclusions were drawn. In comparison to single-crystal silicon samples without texture preparation, all single-crystal silicon textured samples exhibited a significant reduction in the wear rate of single-crystal silicon, with values decreasing from 0.012 mm3/(N.m) to below 0.008 mm3/(N.m), and in some cases, reaching as low as 0.001. Some single-crystal silicon textured samples could also reduce the coefficient of friction. Analysis of SEM and EDS detection results revealed that the primary wear mechanisms for single-crystal silicon were abrasive wear and adhesive wear. In textured single-crystal silicon samples, there were fewer and shallower wear marks, indicating that surface texture could collect wear debris generated by friction and assisting in protecting the surface of single-crystal silicon and improving its tribological performance. In terms of simulation analysis, the average equivalent stress of textured single-crystal silicon samples was higher than that of untreated single-crystal silicon samples. This was because the processing texture on the single-crystal silicon sample disrupted its overall integrity, and the complex texture patterns led to stress concentration in the material. The temperature variations caused by frictional heating showed that the high-temperature region on the surface of textured samples was smaller than that on non-textured samples, indicating that continuous texture patterns could improve the heat dissipation capability of single-crystal silicon. In summary, surface texturing can improve the tribological performance of single-crystal silicon from multiple perspectives, significantly reducing its wear rate, decreasing the coefficient of friction, and enhancing heat dissipation capabilities. However, because texture can impact the strength of single-crystal silicon samples, it is essential to consider various factors when selecting texture parameters. The significance of this research extends beyond single-crystal silicon materials and can be applied to various materials that operate in frictional environments, improving their tribological performance and material protection. |
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