| LI Chao,SUN Gang,MA Guojia,WU Junsheng,ZHANG Bowei,ZHANG Haoze.Effects of Tantalum Doping on Friction and Corrosion Behavior of Multilayer Ta-DLC Films[J],53(8):63-73 |
| Effects of Tantalum Doping on Friction and Corrosion Behavior of Multilayer Ta-DLC Films |
| Received:May 11, 2023 Revised:October 03, 2023 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2024.08.006 |
| KeyWord:DLC film magnetron sputtering corrosion friction and wear element doping |
| Author | Institution |
| LI Chao |
Institute of Advanced Materials and Technology, University of Science and Technology Beijing, Beijing , China;AECC Aviation Power Co., Ltd., Xi'an , China |
| SUN Gang |
a.Science and Technology on Power Beam Processes Laboratory, b.Aeronautical Key Laboratory for Advanced Surface, AVIC Manufacturing Technology Institute, Beijing , China |
| MA Guojia |
a.Science and Technology on Power Beam Processes Laboratory, b.Aeronautical Key Laboratory for Advanced Surface, AVIC Manufacturing Technology Institute, Beijing , China |
| WU Junsheng |
Institute of Advanced Materials and Technology, University of Science and Technology Beijing, Beijing , China |
| ZHANG Bowei |
Institute of Advanced Materials and Technology, University of Science and Technology Beijing, Beijing , China |
| ZHANG Haoze |
a.Science and Technology on Power Beam Processes Laboratory, b.Aeronautical Key Laboratory for Advanced Surface, AVIC Manufacturing Technology Institute, Beijing , China |
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| Abstract: |
| Diamond-like carbon (DLC) films are widely applied in material protection due to high hardness, excellent wear resistance, and corrosion resistance. To solve the problem that 316L stainless steel is prone to wear and corrosion in the environment of marine friction and corrosion, Ta/TaN/TaCN/Ta-DLC films were deposited on 316L stainless steel by mid-frequency magnetron sputtering technology. The surface morphology, cross-sectional morphology, and corrosion morphology of the prepared films were observed by scanning electron microscopy (SEM). Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), and X-ray diffractometer (XRD) were used to analyze the electronic structure of carbon element, chemical bond information, and phase composition in DLC films, respectively. The tribological and mechanical properties were tested by scratch method, nanoindentation test, and friction and wear test. The corrosion resistance of the films was tested by the electrochemical method. The effect of Ta element content in DLC film on the structure, composition, mechanical properties, tribological properties and corrosion resistance of the film was studied. |
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