| XIE Gui-jiu,YANG Bin,ZHANG Yue-xin,ZHANG Lu,JI Hui-ming.The Effect of Working Temperature on Hydrogen Sensor Performance Based on Pd-Ni Alloy Thin-films[J],52(4):381-389 |
| The Effect of Working Temperature on Hydrogen Sensor Performance Based on Pd-Ni Alloy Thin-films |
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| DOI：10.16490/j.cnki.issn.1001-3660.2023.04.034 |
| KeyWord:working temperature thin-film hydrogen hydrogen sensitivity Pd-Ni alloy false-zero point |
| Author | Institution |
| XIE Gui-jiu |
Key Laboratory of Advanced Ceramics and Machining Technology, Ministry of Education, School of Materials Science and Engineering, Tianjin University, Tianjin , China;The 48th Research Institute of China Electronics Technology Group Corporation, Changsha , China |
| YANG Bin |
School of Materials Science and Engineering, Hunan University, Changsha , China |
| ZHANG Yue-xin |
The 48th Research Institute of China Electronics Technology Group Corporation, Changsha , China |
| ZHANG Lu |
Key Laboratory of Advanced Ceramics and Machining Technology, Ministry of Education, School of Materials Science and Engineering, Tianjin University, Tianjin , China |
| JI Hui-ming |
Key Laboratory of Advanced Ceramics and Machining Technology, Ministry of Education, School of Materials Science and Engineering, Tianjin University, Tianjin , China |
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| Abstract: |
| Hydrogen sensors is urgently demanded for hydrogen leakage detection in the space field and energy supply system for hydrogen fuel cell vehicles. However, the effect of the working temperature on the hydrogen resistance properties of Pd-Ni alloy films is still not clear in different actual working conditions. Therefore, it is necessary to study the effect of working temperature on the sensitivity, response-recovery time and back-zero characteristics of the Pd-Ni alloy thin film resistance. The Pd-Ni alloy thin film resistance chip was prepared on the Al2O3 ceramic substrate by an ion-beam sputtering and a Lift-Off technique. After the heat treatment in a certain atmosphere and for a certain time, a printed circuit board of the packaging structure was placed at different operating temperatures of 80 ℃, 90 ℃, 100 ℃ and 110 ℃. By using the dynamic gas test method, the test gas with different hydrogen concentration of a certain flow was measured through the data acquisition system, and the hydrogen sensitive characteristics were evaluated. The nitrogen zero-point resistor and hydrogen sensitivity response resistance values of Pd-Ni hydrogen sensitive resistance increased almost linearly with increasing temperature. The zero resistance was enhanced by 10 Ω as the temperature increased by 10 ℃. At 2% and 4%, the response resistance increased by 9 Ω for every 10 ℃ increase in temperature. At the concentrations of 2%H2/N2 and 4%H2/N2 hydrogen, the sensitivity at 110 ℃ decreased nearly 28% compared to 80 ℃, and decreased nearly linearly with increasing the operating temperature. The sensitivity was 1.001% and 1.386% at the 2% concentration for the cases of 2%H2/N2 and 4%H2/N2, respectively; The sensitivity was 1.33% and 1.837% at the 4% concentration for the cases of 2%H2/N2 and 4%H2/N2, respectively. For the same hydrogen concentration, the response time and recovery time decreased rapidly initially and then tended to decrease slowly with further increasing the temperature. The response and recovery times were nearly equivalent under the same conditions, the response-recovery time at concentrations of 2% and 4% was reduced from 16.5 s, 12.9 s at 80 ℃ to 12.5 s, 9.5 s at 110 ℃, respectively. As the hydrogen concentration increases, the response-recovery time increased by about 3-5 s at an operating temperature of 110 ℃, and the response-recovery times at concentrations of 2% and 4% were 12.48 s and 9.37 s, respectively. The decrease of sensitivity and the increase of response-recovery time entered the saturation region at 100-110 ℃. Considering the response-recovery time and sensitivity comprehensively, it showed good performance at the operating temperature of 90-100 ℃. The recovery of the zero-point resistance to the relative equilibrium platform at 80 ℃ was 5-10 min slower compared to 110 ℃. At operating temperatures of 100 ℃ and 110 ℃. The zero-point resistance initially decreased and then stabilized. In particular, the 110 ℃ overshoot was particularly evident. The zero-point resistance of this working temperature range stabilized faster. The zero resistance was different or not restored to absolute zero in nitrogen or air atmosphere. The absolute value of the hydrogen concentration measurement was not affected. The working temperature would reduce the hydrogen sensitivity, but can improve its response-recovery time, also accelerate the recovery of its zero point resistance. The higher the hydrogen concentration, the faster the response-recovery time, Comprehensive performance of sensitivity, response-recovery time and zero speed was improved at 100 ℃. We also found "false zero" phenomenon, which can guide us to obtain the actual scene more effectively. |
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