| ZHANG Yi-yong,JING Zhi-yuan,ZHANG Zhi-bin,LIANG Xiu-bing.Effects of Nitrogen Content on Mo-Ta-W-N Multi-principal Alloy Nitride Thin Films[J],52(1):21-28 |
| Effects of Nitrogen Content on Mo-Ta-W-N Multi-principal Alloy Nitride Thin Films |
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| DOI：10.16490/j.cnki.issn.1001-3660.2023.01.002 |
| KeyWord:multi-principal alloy nitride thin film reaction multi-target magnetron sputtering structure mechanical property |
| Author | Institution |
| ZHANG Yi-yong |
Defense Innovation Institute, Academy of Military Science, Beijing , China |
| JING Zhi-yuan |
Defense Innovation Institute, Academy of Military Science, Beijing , China |
| ZHANG Zhi-bin |
Defense Innovation Institute, Academy of Military Science, Beijing , China |
| LIANG Xiu-bing |
Defense Innovation Institute, Academy of Military Science, Beijing , China |
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| Abstract: |
| Due to the particularity of composition, multi-principal alloy shows many superior performances, such as higher strength and hardness, better wear and corrosion resistance, and better oxidation resistance at high temperature, so it has been extensively studied in recent decades. Due to the limitation of thickness, the mechanical properties of multi-principal alloy films are even higher than those of multi-principal alloy with the same composition. By adding carbon, nitrogen, oxygen and other non-metallic elements into the multi-principal alloy, the performance of multi-principal compound thin film has been further improved. The aim of this study was to investigate the effect of nitrogen content on the microstructure and mechanical properties of MoTaW multi-principal alloy films, and to improve the mechanical properties of Mo-Ta-W multi-principal alloy thin films. In this paper, Mo-Ta-W-N multi-principal alloy nitride films with different nitrogen content were prepared on monocrystal silicon by reactive multi-target magnetron sputtering technique. The composition, element content, structure, microscopic morphology of surface and section, thickness, and roughness of Mo-Ta-W-N multi-principal alloy nitride films were characterized using X ray photoelectron spectroscope, grazing incident Angle X-ray diffraction, field emission scanning electron microscope, atomic force microscope. The hardness and elastic modulus of Mo-Ta-W-N multi-principal alloy nitride films were tested using nano indentation apparatus. The nitrogen content of Mo-Ta-W-N multi-principal alloy nitride film increased with the increase of nitrogen flow rate during sputtering. When the nitrogen flow rate reached 50%, the nitrogen content in the film increased to 49%, while the tantalum content decreased to 12%. The decrease of tantalum content is mainly due to the toxic phenomenon of target material. The bindings of Ta-N and Mo-N, but not W-N, were found in the nitride film. After the formation of nitride, Mo-Ta-W multi-principal component film changed from BCC structure to single-phase FCC solid solution structure, and its surface changed from lamellar structure to cauliflower-like cluster structure. Each cluster was composed of smaller particles. With the increase of nitrogen flow rate, the surface particle size of the film decreased first and then increased. When the nitrogen flow rate was 50%, the cross section of Mo-Ta-W-N nitride had a double-layer structure, and a compact featureless amorphous layer was formed near the base. With the increase of nitrogen content, the roughness of the surface decreased first and then increased, while the thickness decreased continuously. Compared with Mo-Ta-W multi-principal alloy film, the mechanical properties of Mo-Ta-W multi-principal element alloy nitride film were improved. The mechanical properties of Mo-Ta-W multi-principal alloy nitride film are enhanced for the following reasons. First, after nitrogen is introduced into the film, stronger covalent bonds are formed between metal elements and nitrogen, and the bond energy is much greater than that of metal bonds. Second, the addition of nitrogen as an interstitial atom also cause serious lattice distortion effect of the film, resulting in more significant solution strengthening effect. However, the mechanical properties of the films decreased with the increase of nitrogen content, mainly because the denseness of the films decreased with the further increase of nitrogen flow rate and the enhancement of re-sputtering effect. When the nitrogen flow rate was 10%, the hardness and elastic modulus of Mo-Ta-W-N multi-principal alloy nitride film were 34.3 GPa and 327.5 GPa, respectively. |
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