| YANG Juan,FAN Zhen,YUAN Ning-yi,DING Jian-ning.The Effect of Substrate on the Performance of TiNxOySolar Selective Absorbing Films[J],42(3):16-18 |
| The Effect of Substrate on the Performance of TiNxOySolar Selective Absorbing Films |
| Received:December 25, 2012 Revised:January 19, 2013 |
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| DOI： |
| KeyWord:TiNxOyfilm solar energy optical properties adhesion porous structured substrate |
| Author | Institution |
| YANG Juan |
Micro / Nano Science & Technology Center, Jiangsu University, Zhenjiang , China |
| FAN Zhen |
Micro / Nano Science & Technology Center, Jiangsu University, Zhenjiang , China;School of Mechanical & Automobile Engineering, Jiangsu Teacher University of Technology, Changzhou , China |
| YUAN Ning-yi |
Low-dimension Material Micro / Nano Device & System Center, Changzhou University, Changzhou , China |
| DING Jian-ning |
Micro / Nano Science & Technology Center, Jiangsu University, Zhenjiang , China;Low-dimension Material Micro / Nano Device & System Center, Changzhou University, Changzhou , China |
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| Abstract: |
| The AlN / TiNxOy/ Al multilayers were deposited on Al substrate and Cu substrate by magnetron sputtering technology and the adhesion properties between the multilayers and two kinds of substrates were investigated respectively and the reasons of different adhesion of substrates were analyzed. Porous structures were made on the Al substrate by a two-step anodization method, and then the multilayers were deposited, and the surface morphology, the optical properties and the reflectance of the multilayers were tested. Then the influence of microstructure on the performance of solar absorbing films was studied. The results showed that the adhesion properties between the multilayers and Al substrate were better and porous structures could improve the absorptance of the solar selective absorbing films. |
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