| JIANG Qiang,WU Xiao-nan,ZHOU Xi-ying,YAN Zhi,MAO Xiu-juan,LI Ming.Research on Al Thin Films Deposited on the Flexible Base Materials[J],42(1):67-70 |
| Research on Al Thin Films Deposited on the Flexible Base Materials |
| Received:August 22, 2012 Revised:October 01, 2012 |
| View Full Text View/Add Comment Download reader |
| DOI： |
| KeyWord:magnetron sputtering flexible substrate Al thin film |
| Author | Institution |
| JIANG Qiang |
School of Material Engineering, Shanghai University of Engineering Science, Shanghai , China |
| WU Xiao-nan |
School of Material Engineering, Shanghai University of Engineering Science, Shanghai , China |
| ZHOU Xi-ying |
School of Material Engineering, Shanghai University of Engineering Science, Shanghai , China |
| YAN Zhi |
School of Material Engineering, Shanghai University of Engineering Science, Shanghai , China |
| MAO Xiu-juan |
School of Material Engineering, Shanghai University of Engineering Science, Shanghai , China |
| LI Ming |
School of Material Engineering, Shanghai University of Engineering Science, Shanghai , China |
|
| Hits: |
| Download times: |
| Abstract: |
| Al thin films were respectively deposited by DC magnetron sputtering on the flexible substrates, such as the polyester , the aramid and the cotton etc. The deposition rate, structure and surface morphology of the aluminum thin films were studied. The results show that the deposition rate increases almost linearly with increasing sputtering power in a certain range. On the other hand, the deposition rate increases with increasing working pressure then decreases when it came up to the maximum peak. The crystal structures of the films are influenced due to the different substrates. The films on the polyester and cotton only have typical polycrystalline face-centered cubic structure. The films on the aramid and polyester are more uniform density and the particles are smaller than the ones on the cotton. Within a certain range, the increase of the sputtering power does enhance the quality of the thin films. |
| Close |
|
|
|