| SUN Wei-lian,AN Guang,SUN Bo,WANG Hui-qiang,LI Xin-ling.Effect of Film Thickness on the Color of Magnetron Sputtering ZrN Films[J],(2):47-49，78 |
| Effect of Film Thickness on the Color of Magnetron Sputtering ZrN Films |
| Received:December 05, 2011 Revised:April 20, 2012 |
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| DOI： |
| KeyWord:deposition rate film thickness ZrN film color |
| Author | Institution |
| SUN Wei-lian |
College of Mechanical and Electric Engineering, Agricultural University of Hebei, Baoding , China |
| AN Guang |
College of Mechanical and Electric Engineering, Agricultural University of Hebei, Baoding , China |
| SUN Bo |
College of Mechanical and Electric Engineering, Agricultural University of Hebei, Baoding , China |
| WANG Hui-qiang |
College of Mechanical and Electric Engineering, Agricultural University of Hebei, Baoding , China |
| LI Xin-ling |
College of Mechanical and Electric Engineering, Agricultural University of Hebei, Baoding , China |
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| Abstract: |
| The ZrN film was prepared on the mirror stainless steel plate by using unbalanced magnetron sputtering technique. The thickness of ZrN films was controlled by changing the coating time. The L* ,a* ,b* values of the ZrN thin films with different thickness was measurea with X-rate colorimeter. The curve about the L* ,a* ,b* values of the ZrN thin films with different thickness was draw out. The color variation of the magnetron sputtering ZrN films effected by the film thickness is obtained: when film thickness is less than about 63.7 nm, with the film thickness increasing, the L* ,a* values do not change, b* values are increase by linear, and the color of the film become gold gradually; when film thickness is over about 63.7 nm, with the film thickness increasing, the chromaticity coordinates of the film has no significant change, and the color is stable gold. |
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