YUAN Lin,GAO Yuan,ZHANG Wei,WANG Cheng-lei,MA Zhi-kang,CAI Hang-wei.EffectofNegativeBiasVoltageonTiNCoatingDepositedbyMAIP[J],(1):20-22,26
EffectofNegativeBiasVoltageonTiNCoatingDepositedbyMAIP
Received:October 04, 2011  Revised:February 20, 2012
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KeyWord:MAIP  negative bias voltage  TiN coating  corrosion resistance
                 
AuthorInstitution
YUAN Lin School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin,China
GAO Yuan School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin,China
ZHANG Wei School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin,China
WANG Cheng-lei School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin,China
MA Zhi-kang School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin,China
CAI Hang-wei School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin,China
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Abstract:
      TiN coatings of different negative bias voltage were deposited on 201 stainless steel by multi-arc ion plating(MAIP). The effect of negative bias voltage on the surface microstructure, hardness, phase structure and the corrosion resistance of the coatings was investigated. Results showed that there were many droplet particles in the surface. When the negative bias voltage increased, the number and size of droplets decreased; But when the substrate bias increased to a certain value, there appeared some pits. The hardness increased at first but decreased later with the increasing of the negative bias voltage. When the negative bias voltage was-200V, the intrinsic hardness of TiN film was 2 195HV. Compared with 201 stainless steel,the corrosion resistance of TiN coatings samples was improved slightly in 3.5% NaCl solution; In l mol/L H2SO4 solution, the corrosion resistance of the-100V sample was best; Compared with untreated 201 stainless steel, the corrosion resistance of the-100V coating sample was increased 475 times.
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