| YAN Fu-xue,BAI Li-jing,YIN Peng.Effects of Bias Voltage on Microstructure and Stress of GLC Films[J],39(2):28-30 |
| Effects of Bias Voltage on Microstructure and Stress of GLC Films |
| Received:January 03, 2010 Revised:April 10, 2010 |
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| DOI： |
| KeyWord:GLC films films stress bias voltage |
| Author | Institution |
| YAN Fu-xue |
Xi'an University of Technology, Xi'an , China |
| BAI Li-jing |
Xi'an University of Technology, Xi'an , China |
| YIN Peng |
Xi'an University of Technology, Xi'an , China |
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| Abstract: |
| The GLC(Graphite-Like Carbon)films were synthesized by the magnetron sputtering ion plating technology. The thickness of the films was measured by scanning electron microscopy(SEM), the microstructure and stress of the films were determined by X-ray diffraction(XRD)and transmission electron microscope(TEM), respectively. The results indicate that amorphous GLC films are obtained with the different bias voltage, and as the bias voltage increasing, the film thickness gradually decreases. At the same time,in the given the bias voltage, the stress value of the film first increases and then decreases along with the bias voltage increasing,which reaches the maximum value when the bias voltage value up to- 65 V. |
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