| CUI Xin-qiang,LI Hai-bing,LI Guo-qing,JIANG Bao-cai.Influence of Ti Ions Implantation on Quartz Metalization[J],39(1):48-50,55 |
| Influence of Ti Ions Implantation on Quartz Metalization |
| Received:December 21, 2009 Revised:February 10, 2010 |
| View Full Text View/Add Comment Download reader |
| DOI： |
| KeyWord:Ti ions implantation Quartz coated with Ti film Interfacial adhesion and bond strength |
| Author | Institution |
| CUI Xin-qiang |
Shanghai Institue of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai , China |
| LI Hai-bing |
Shanghai Institue of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai , China |
| LI Guo-qing |
Key Laboratory of Material Modification by Laser, Ion and Electron Beams,Dalian University of Technology, Dalian , China |
| JIANG Bao-cai |
Shanghai Institue of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai , China |
|
| Hits: |
| Download times: |
| Abstract: |
| Titanium ions were implanted into quartz and quartz coated with Ti film by MEVVA(Metal Vapor Vacuum Arc)ion source implanter.The dose was 3× 1016 ions/cm2 and 5× 1016 ions/cm2.The ion energy and depth distribution were analyzed using simulation method. Depth profiles of Ti concentration were measured by RutIlerf-0rd Back-scattering Spectrometry(RBS).The interfacial adhesion and bond strength between thin film coating and substrate were tested by scratch method. The result shows thatimplanted with Ti the largest component of Ti is about 30 nm for quartz and 15nm for quartz coated with Ti film.Implantation ions penetrated into the substrate through the film. The interfacial adhesion and bond strength between thin film coating and substrate have an increase of 90% after Ti ions implantation with the dose of 5× 1016 ions/cm2 |
| Close |
|
|
|