| XU Hui,ZHU Xin-fa,ZHANG Jing-jing,ZHOU Yi-xin,LI Guan-qun,LI Ge-yang.Microstructure and Mechanical Properties of Hafnium Carbide Coatings Synthesized by Reactive Magnetron Sputtering[J],39(1):5-8 |
| Microstructure and Mechanical Properties of Hafnium Carbide Coatings Synthesized by Reactive Magnetron Sputtering |
| Received:November 17, 2009 Revised:February 10, 2010 |
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| DOI： |
| KeyWord:Hafnium carbide Hard coatings Microstructure Mechanical properties Magnetron sputtering |
| Author | Institution |
| XU Hui |
Machinery Industry Key Lab.of Tool Coating Technology,Shanghai Tool Works Co.Ltd.,Shanghai ,China |
| ZHU Xin-fa |
Machinery Industry Key Lab.of Tool Coating Technology,Shanghai Tool Works Co.Ltd.,Shanghai ,China |
| ZHANG Jing-jing |
Machinery Industry Key Lab.of Tool Coating Technology,Shanghai Tool Works Co.Ltd.,Shanghai ,China |
| ZHOU Yi-xin |
Machinery Industry Key Lab.of Tool Coating Technology,Shanghai Tool Works Co.Ltd.,Shanghai ,China |
| LI Guan-qun |
State Key Lab. of Metal Matrix Composites, Shanghai Jiaotong University, Shanghai , China |
| LI Ge-yang |
State Key Lab. of Metal Matrix Composites, Shanghai Jiaotong University, Shanghai , China |
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| Abstract: |
| Hafnium carbide coatings with different carbon contents were synthesized in Ar-C2H2mixture by reactive magnetron sputtering. Energy-dispersive X-ray, X-ray diffraction, scanning electron microscopy, atomic force microscopy and nanoindentation were employed to characterise their microstructure and mechanical properties. The effects of C2H2partial pressure on the composition,phase,microstructure and mechanical properties of the coatings were investigated. The results show that hafnium carbide coatings can be synthesized at a low partial pressure of C2H2. The single phase HfC coating with columnar crystal and favorable mechanical properties could be obtained when the proportion of C2H2partial pressure was only about 3.0% in the mixture, and the highest hardness and modulus were 27.9 GPa and 255 GPa respectively. The coating contains metal Hf and HfC phases and obtains low hardness under lower C2H2partial pressure. When the C2H2partial pressure is higher, the hardness and elastic modulus of acquired amorphous coatings decrease significantly. |
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