| ZHU Chun-yan,ZHU Chang.The Optical Properties of AIN film by Magnetron Reactive Sputtering[J],37(1):17-18,31 |
| The Optical Properties of AIN film by Magnetron Reactive Sputtering |
| Received:September 10, 2007 Revised:February 10, 2008 |
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| DOI： |
| KeyWord:AIN film Refractive index Transmission FTIR spectrum Magnetron reactive sputtering |
| Author | Institution |
| ZHU Chun-yan |
School of Optoelectronic Engineering, Xian Technological University, Xian , China |
| ZHU Chang |
School of Optoelectronic Engineering, Xian Technological University, Xian , China |
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| Abstract: |
| Aluminum nitride( AIN) thin film using magnetron reactive sputtering were studied by spectroscopic ellipsometry, ultraviolet-visible spectrometry and FTIR spectrometry. The refractive index of the film is 2. 0-2. 4 in the wavelength range from 400nm to llOOnm. The AIN film has an intense absorption in the far ultraviolet ray range of 200nm-300nm, and high transmission in the wavelength range of 400nm-760nm. An intense absorption exists at 677 cm-l of wavelength in the FTIR spectrum, it is shown that the film comes into being aluminum nitride. |
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