赵彦辉,于泽洋,郭兆信,于晓明.乙炔含量对DLC涂层结构及力学性能的影响[J].表面技术,2025,54(7):98-108.
ZHAO Yanhui,YU Zeyang,GUO Zhaoxin,YU Xiaoming.Effect of C2H2 Content on the Structure and Mechanical Properties of DLC Coatings[J].Surface Technology,2025,54(7):98-108 |
| 乙炔含量对DLC涂层结构及力学性能的影响 |
| Effect of C2H2 Content on the Structure and Mechanical Properties of DLC Coatings |
| 投稿时间：2024-07-05 修订日期：2024-11-14 |
| DOI：10.16490/j.cnki.issn.1001-3660.2025.07.008 |
| 中文关键词: DLC涂层 C2H2含量 纳米硬度 摩擦性能 电化学腐蚀 |
| 英文关键词:DLC coating C2H2 content nano hardness tribological properties electrochemical corrosion |
| 基金项目:辽宁省教育厅高等学校基本科研项目(LJKZ0233-z) |
| 作者 | 单位 |
| 赵彦辉 | 上海电子信息职业技术学院 中德工程学院，上海 201411 |
| 于泽洋 | 沈阳理工大学 材料科学与工程学院，沈阳 110159 |
| 郭兆信 | 沈阳理工大学 材料科学与工程学院，沈阳 110159 |
| 于晓明 | 沈阳理工大学 材料科学与工程学院，沈阳 110159 |
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| Author | Institution |
| ZHAO Yanhui | Sino-German Institute of Engineering, Shanghai Technical Institute of Electronics & Information, Shanghai 201411, China |
| YU Zeyang | College of Materials Science and Engineering, Shenyang Ligong University, Shenyang 110159, China |
| GUO Zhaoxin | College of Materials Science and Engineering, Shenyang Ligong University, Shenyang 110159, China |
| YU Xiaoming | College of Materials Science and Engineering, Shenyang Ligong University, Shenyang 110159, China |
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| 中文摘要: |
| 目的 研究工作气氛中C2H2气体含量对含氢DLC涂层微观组织结构变化特征、力学性能、摩擦学性能及生物腐蚀性能的影响。方法 采用电弧增强辉光放电(Arc Enhanced Glow Discharge, AEGD)离子源辅助电弧离子镀，在316L不锈钢表面沉积以Cr/CrC为过渡层的含氢DLC复合涂层，利用扫描电镜、激光3D显微镜、拉曼光谱、X射线光电子能谱仪表征DLC涂层的微观结构，采用纳米压痕仪、摩擦磨损试验机研究涂层的力学、摩擦学性能，采用电化学工作站研究涂层的生物腐蚀性能。结果 随着C2H2含量的增加，真空室内离子密度降低，对涂层表面的轰击作用减弱，涂层的表面粗糙度增大，同时水静态接触角降低;拉曼光谱和XPS结果表明，随着C2H2含量的增加，涂层中拉曼谱峰强度ID/IG的比值呈现先降低后增大的趋势，涂层中sp3键含量呈现先增加后降低的趋势，在体积分数33%的C2H2条件下制备的涂层的sp3键含量高达78%;纳米压痕结果表明，涂层硬度、弹性模量、磨损率随着C2H2的含量呈先增加后降低的趋势;在体积分数33%的C2H2条件下制备的涂层的硬度和模量分别可高达61、414 GPa，摩擦磨损结果表明，磨损率随着C2H2含量的增加，呈先降低后略增加的趋势。结论 在体积分数33%的C2H2条件下制备的涂层的硬度和弹性模量最高，摩擦因数最低，磨损率最低，耐磨性能最佳;在70%的C2H2下制备的涂层的腐蚀电流密度最低，自腐蚀电位最高，耐蚀性最佳。 |
| 英文摘要: |
| DLC coating is a metastable amorphous carbon coating material composed of diamond structure (sp3 hybrid bond) and graphite structure (sp2 hybrid bond) hybrid bonds. Compared with DLC coatings without hydrogen, DLC coatings with hydrogen have advantages in certain friction fields. In recent years, an arc enhanced glow discharge (AEGD) technology has been proposed, which is generally used for sputtering cleaning of the substrate surface before coating. The work aims to adopt the AEGD as an ion source, which is ionized by introducing carbon containing gas to generate plasma, and then deposited onto the surface of the substrate to form a hydrogen-contained DLC coating. A multifunctional vacuum hybird coating equipment produced by China was adopted, consisting of 5 arc targets and 1 AEGD ion source. The base materials were M2 high-speed steel and 304 stainless steel, with dimensions of ϕ20 mm×3 mm. Before coating, high-energy argon ions generated by AEGD were used to bombard and sputter the substrate surface for 50 minutes to remove the oxide layer and pollutants on the substrate surface. Next, Cr and CrC transition layer was deposited on the substrate surface with a Cr target (99.95%) before depositing the DLC. Then, in order to investigate the effect of C2H2 gas flow rate on the performance of DLC coatings, the C2H2 gas flow rates were controlled at 28, 38, 55, 77, 88 mL/min, and the coating time was 60 min. The surface morphology of the DLC coating was observed with a ZEISS Sigma 300 scanning electron microscope (SEM), the surface roughness was tested with an LS4000 laser 3D microscope produced by Olympus Corporation in Japan, the chemical composition and bonding were measured with Raman spectroscopy, and the composition and bonding status of the DLC coating were tested with an XPS (ESCALAB 250 spectrometer, Thermo Fisher Scientific). The nano hardness and elastic modulus were measured with a Nano Indentation G200, with an indentation depth of 80 nm. The HSR-2M high-speed reciprocating friction and wear testing machine produced by Lanzhou Zhongke Kaihua was used to test the friction and wear performance of DLC coatings. ZrO2 ceramic balls with a diameter of 5 mm were selected as the friction pair, and the contact form was ball surface point contact. Hydrogen-contained DLC coatings were successfully prepared by arc enhanced glow discharge assisted arc ion plating equipment at 25%-80% (volume percent) C2H2. The SEM results showed that the effect of C2H2 content on the surface morphology of DLC coatings was relatively low. The structure of DLC coatings prepared with different C2H2 contents varied, with coatings prepared with 33% C2H2 content showing significantly higher sp3 hybrid bond content (78.17%) than those prepared with other C2H2 contents, while coatings prepared with other C2H2 contents generally had lower sp3 hybrid bond content. The highest hardness (61 GPa) and elastic modulus (414 GPa) of DLC coating were obtained at 33% C2H2. The mechanical properties of coatings prepared with 33% C2H2 were significantly higher than other parameters. Within the range of 25%-80% C2H2, the contact angle gradually decreased with the increase of C2H2 content. The coating prepared with 33% C2H2 had the lowest friction coefficient, the lowest wear rate, and the best wear resistance. Within the range of 25% to 70% C2H2, as the C2H2 content increases, the electrochemical corrosion current density of the prepared DLC coating gradually decreases. The coating prepared with 70% C2H2 has the lowest self-corrosion current density, the highest self-corrosion potential, and the best corrosion resistance. |
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