李花,李刘合,李多铎,唐令,罗阳,韩明月,郑英晓,宋万万.调制周期对CrNx/TiAlSiN多层涂层抗冲蚀性的影响[J].表面技术,2024,53(19):82-92, 140.
LI Hua,LI Liuhe,LI Duoduo,TANG Ling,LUO Yang,HAN Mingyue,ZHENG Yingxiao,SONG Wanwan.Effect of Modulation Periods on Erosion Performance of CrNx/TiAlSiN Multilayer Coatings[J].Surface Technology,2024,53(19):82-92, 140 |
| 调制周期对CrNx/TiAlSiN多层涂层抗冲蚀性的影响 |
| Effect of Modulation Periods on Erosion Performance of CrNx/TiAlSiN Multilayer Coatings |
| 投稿时间：2023-10-20 修订日期：2024-03-13 |
| DOI：10.16490/j.cnki.issn.1001-3660.2024.19.008 |
| 中文关键词: 电弧复合磁控 多层涂层 调制周期 抗冲蚀性能 损伤破坏 |
| 英文关键词:arc composite magnetron multilayer coating modulation period erosion resistance damage mechanism |
| 基金项目:国家自然科学基金(NSFC 12275014，NSFC 12305278);中国博士后科学基金(2023M730180);中央高校基本科研业务费专项资金(YWF-23-Q-1019);国家资助博士后研究人员计划(GZB20230929) |
| 作者 | 单位 |
| 李花 | 北京航空航天大学 机械工程及自动化学院，北京 100191 |
| 李刘合 | 北京航空航天大学 机械工程及自动化学院，北京 100191 |
| 李多铎 | 北京航空航天大学 机械工程及自动化学院，北京 100191 |
| 唐令 | 北京航空航天大学 机械工程及自动化学院，北京 100191 |
| 罗阳 | 北京航空航天大学 机械工程及自动化学院，北京 100191 |
| 韩明月 | 北京航空航天大学 机械工程及自动化学院，北京 100191 |
| 郑英晓 | 沈阳飞机工业集团有限公司，沈阳 110034 |
| 宋万万 | 沈阳飞机工业集团有限公司，沈阳 110034 |
|
| Author | Institution |
| LI Hua | School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China |
| LI Liuhe | School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China |
| LI Duoduo | School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China |
| TANG Ling | School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China |
| LUO Yang | School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China |
| HAN Mingyue | School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China |
| ZHENG Yingxiao | Shenyang Aircraft Corporation, Shenyang 110034, China |
| SONG Wanwan | Shenyang Aircraft Corporation, Shenyang 110034, China |
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| 中文摘要: |
| 目的 在砂粒环境下，改善TiAlSiN硬质涂层于高角度下的抗冲蚀性能。方法 采用电弧离子镀复合高功率脉冲磁控溅射技术，制备不同调制周期下的CrNx/TiAlSiN多层涂层。应用电子扫描电镜、X射线衍射仪、纳米压痕仪和划痕仪对涂层的显微结构、物相组成、纳米硬度、弹性模量以及结合力进行分析，于冲蚀试验平台对涂层抗冲蚀性能进行评价( Al3O2砂粒平均粒径为50 μm，冲蚀速度为30 m/s，角度为90°)。结果 涂层结构致密，由面心立方结构c-(Ti,Al)N、c-Cr、c-CrN和六方h-Cr2N相构成。随着CrNx子层结构的引入，TiAlSiN子层对应的(220)取向逐渐消失，(111)衍射晶面逐渐呈现。随着调制周期减少，CrNx子层对应的h-Cr2N(300)和c-CrN(220)衍射峰强度表现出先逐渐降低、后缓慢增加的规律。涂层结合变化幅度不大，处于68~71 N。虽然纳米硬度和弹性模量逐渐下降，分别从(37.5±0.46) GPa和(339.92±1.85) GPa下降至(31.2±0.40) GPa和(267.50±7.98) GPa，但H/E韧性指标逐渐增加，从0.110 增加至0.116。在最小调制周期下，涂层表现出最优抗冲蚀性能，其冲蚀速率仅TiAlSiN硬质涂层的1/5。结论 调制周期的减少增加了涂层界面数目，对扩展的裂纹起到了很好偏转作用，提升了涂层韧性，贡献了涂层抗冲蚀性能。在砂粒反复冲击作用下，于涂层中产生了交互作用的横纵裂纹，致使涂层以碎屑脆性剥落机制而失效，破坏特征表现为逐层剥落。 |
| 英文摘要: |
| Particle erosion is a seriously problem threatening the safety of high-speed rotating mechanical components in a dusty service environment. TiAlSiN coatings with high hardness and some extent toughness is a kind of promising erosion protective ceramic hard coatings. In this paper, CrNx sublayers were introduced to explore its impacts on the erosion performance of TiAlSiN coatings at high angle sand erosion. On TC6 substrates, CrNx/TiAlSiN multi-layer coatings with different modulation cycles (1, 2, 4, 6, 8, 10) were prepared by combining arc ion plating and high-power pulsed magnetron sputtering. The sectional and surface morphology, phase composition, hardness, elastic modulus, toughness and adhesion strength between the deposited coating and the substrate were analyzed by scanning electron microscope (SEM), X-ray diffractometer (XRD), nano-indentation tester and scratch meter respectively. The erosion performance of the coating was evaluated on an erosion test platform, where the particle had an average size of 50 μm, a speed of 30 m/s and feed rate 2 g/min, and impacted at an angle of 90° relative to the sample surface. The results showed that the structure of CrNx/TiAlSiN multilayer coating were compact, composed of face-centered cubic structure c-(Ti,Al)N, c-Cr, c-CrN and hexagonal h-Cr2N phases. Owning to the arc ion plating, the co-deposited droplets during the CrNx introduction appeared on the surface of multilayer coatings. The (220) orientation from the TiAlSiN sublayer gradually disappeared, but the (111) diffraction plane gradually appeared. With the decrease of the modulation period, the number and size of the droplet defects on the coating surface slightly increased, and the diffraction peak intensity of h-Cr2N (300) and c-CrN (220) decreased gradually before increasing in the CrNx sublayer. The adhesion strength between the coating and the substrate increased yet not significantly with the reduction in the modulation period, which was in the range of 68-71 N. The hardness and elastic modulus gradually decreased with the modulation period, from (37.5±0.46) GPa and (339.92±1.85) GPa for single TiAlSiN coating to (31.2±0.40) GPa and (267.50±7.98) GPa for M10 obtained under the minimum modulation period. However, the toughness index H/E ratio almost presented an upward trend, from 0.110 to 0.116. The anti-erosion properties of the coatings seemed to be positively correlated with their toughness and accomplished the optimal for the sample M10. Its erosion rate, with a value of 0.008 mg/g, was only ~ 1/5 of the single-layer TiAlSiN hard coating, with a value of 0.045 mg/g. Moreover, the increased numbers of interface for the reduced modulation period along the thickness direction of the multi-layer structure seemed to play a great role in deflecting the propagation direction of cracks, improving the toughness of the coating, and thus enhancing the erosion resistance of the multilayer coatings. The eroded spot exhibits layer-by-layer spalling failure on the coating surface. The erosion damage mechanism is the interaction of lateral and vertical fatigue cracks during the repeatedly particles impacting. Introducing CrNx sublayers and adjusting its modulation periods with TiAlSiN sublayer is finally proved to be an effective way to improve the coating toughness, and enhance the erosion resistance of TiAlSiN coating. |
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