谷佳慧,魏东博,高泽宇,刘建华,胡玉锦,张平则.高熵陶瓷薄膜晶体结构、制备及其功能特性研究进展[J].表面技术,2023,52(12):274-288, 314.
GU Jia-hui,WEI Dong-bo,GAO Ze-yu,LIU Jian-hua,HU Yu-jin,ZHANG Ping-ze.Research Progress on Crystal Structure, Preparation and Functional Properties of High-entropy Ceramic Thin Films[J].Surface Technology,2023,52(12):274-288, 314 |
| 高熵陶瓷薄膜晶体结构、制备及其功能特性研究进展 |
| Research Progress on Crystal Structure, Preparation and Functional Properties of High-entropy Ceramic Thin Films |
| 投稿时间：2022-09-27 修订日期：2023-03-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2023.12.023 |
| 中文关键词: 高熵陶瓷薄膜 晶体结构 制备工艺 功能特性 应用 |
| 英文关键词:high-entropy ceramic thin films crystal structure preparation process functional properties application |
| 基金项目:粒子输运与富集技术国防科技重点实验室开放课题研究基金(2022-JCJQ-LB-004);中央高校基本科研业务费(NT2022019) |
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| Author | Institution |
| GU Jia-hui | College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
| WEI Dong-bo | College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
| GAO Ze-yu | College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
| LIU Jian-hua | College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
| HU Yu-jin | College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
| ZHANG Ping-ze | College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
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| 中文摘要: |
| 高熵陶瓷薄膜是在高熵合金薄膜中掺入C、N、O等非金属元素形成的碳化物、氮化物、氧化物等性能更优异的薄膜材料。由于高熵陶瓷薄膜具有组分可调节空间大、熵效应独特及材料性能可调控等优点，因此高熵陶瓷薄膜无论是作为结构材料还是功能材料，都有望成为综合多种优异性能的薄膜材料。首先介绍了含有C、N、O等不同非金属元素的高熵陶瓷薄膜的晶体结构，并研究了改变晶体结构的影响因素。除了掺入薄膜中的C、N、O等非金属元素含量会对薄膜的晶体结构产生显著影响外，制备工艺中的工艺参数也会对高熵陶瓷薄膜的晶体结构产生影响。例如，随着基底温度的升高，高熵氮化物薄膜会由非晶结构转变为简单的FCC固溶体结构。另外，基底偏压虽不能直接影响高熵陶瓷薄膜的晶体结构，但对薄膜的择优取向有着显著影响。综述了制备高熵陶瓷薄膜常用的技术，包括磁控溅射技术、脉冲激光沉积技术、真空电弧沉积等。综述了目前国内外研究者对高熵陶瓷薄膜的功能特性的研究进展，包括抗辐照性、扩散阻挡性、电催化性、磁学性、生物相容性等。最后总结了高熵陶瓷薄膜的应用，并指出了目前研究的不足，以及高熵陶瓷薄膜未来的研究方向。 |
| 英文摘要: |
| High-entropy ceramic thin films (HECs) fabricated based on the concept of "high entropy" have excellent performance in functional applications due to their unique crystal structure and four effects, including high-entropy effect, lattice distortion effect, sluggish diffusion effect and "cocktail" effect. In this work, the crystal structures of high-entropy ceramic thin films containing different nonmetallic elements were introduced, and the affecting factors of changing the crystal structures were described. Secondly, the research progress on the functional properties of high-entropy ceramic thin films, including radiation resistance, diffusion barrier, electrocatalysis, magnetism and biocompatibility, was introduced. Finally, the shortcomings of the current research on high-entropy ceramic thin films and the future research directions of high-entropy ceramic thin films were pointed out. High-entropy ceramic thin film is a kind of compound film with better properties, such as carbides, nitrides and oxides, formed by doping C, N, O and other non-metallic elements into the high-entropy alloy film. The doping of C, N, O and other non-metallic elements in the film has a significant impact on the crystal structure of the film. For example, when there are more nitride forming elements in the film, the doping of N in the film will change the film from the original amorphous structure to the FCC structure. When there are more non nitride forming elements in the film, the film will change from the original single FCC structure or the FCC+BCC mixed structure to the amorphous structure. In addition, the parameters in the preparation process will have an impact on the crystal structure of the high-entropy ceramic thin film. For example, with the increase of substrate temperature, the adsorption capacity and surface mobility of atoms increase, and the grain size increases. The high-entropy nitride film presents a simple FCC solid solution phase. In addition, substrate bias can not directly affect the crystal structure of high-entropy ceramic thin films, but has a significant impact on the preferred orientation of the films. High-entropy ceramic thin film is expected to be a composite material with a variety of excellent properties, whether as a structural or functional material, due to its huge adjustable composition space, unique entropy effect and adjustable material properties. For example, high-entropy nitride films can be used in radiation resistant coatings and Cu interconnection diffusion barrier materials for microelectronic circuits due to their excellent radiation resistance and diffusion barrier properties. Because of its corrosion resistance and biocompatibility, high-entropy carbide films have great prospects in biomedical implant coating materials. High-entropy oxide films have excellent performance in lithium ion batteries and electronic ceramics due to their excellent electrical properties. At present, a large amount of research work on high-entropy ceramic thin films focuses on composition design, preparation process, basic properties, etc., of which the research is mostly about the high-entropy nitride films, and the research on crystal structure change rules and functional applications is less. In the future, on the one hand, the research direction should shift from the basic properties such as mechanical properties and corrosion resistance of high-entropy ceramic thin films to the special properties such as radiation resistance, diffusion barrier, electrocatalysis, magnetic properties, etc. On the other hand, the properties and applications of other high-entropy ceramic thin films should be explored except for high-entropy nitride films, high-entropy oxide films, and high-entropy carbide films. |
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