田昌龄,蔡海潮,薛玉君,叶军,李继文.沉积功率对Ce-Ti/MoS2复合涂层摩擦磨损性能的影响[J].表面技术,2023,52(8):197-207.
TIAN Chang-ling,CAI Hai-chao,XUE Yu-jun,YE Jun,LI Ji-wen.Effect of Deposition Power on Friction and Wear Properties of Ce-Ti/MoS2 Composite Coatings[J].Surface Technology,2023,52(8):197-207 |
| 沉积功率对Ce-Ti/MoS2复合涂层摩擦磨损性能的影响 |
| Effect of Deposition Power on Friction and Wear Properties of Ce-Ti/MoS2 Composite Coatings |
| 投稿时间：2022-07-20 修订日期：2023-03-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2023.08.014 |
| 中文关键词: 磁控溅射 二硫化钼涂层 金属掺杂 靶功率 摩擦学性能 |
| 英文关键词:magnetron sputtering molybdenum disulfide coating metal doping target power tribological property |
| 基金项目:国家重点研发计划(2021YFB3400401);河南省科技攻关项目(202102210073) |
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| Author | Institution |
| TIAN Chang-ling | School of Mechatronics Engineering,Henan Key Laboratory for Machinery Design and Transmission System, School of Materials Science and Engineering, Henan University of Science and Technology, Henan Luoyang 471003, China |
| CAI Hai-chao | School of Mechatronics Engineering,Henan Key Laboratory for Machinery Design and Transmission System, School of Materials Science and Engineering, Henan University of Science and Technology, Henan Luoyang 471003, China |
| XUE Yu-jun | School of Mechatronics Engineering,Henan Key Laboratory for Machinery Design and Transmission System, School of Materials Science and Engineering, Henan University of Science and Technology, Henan Luoyang 471003, China;State Key Laboratory of Aviation Precision Bearing of Luoyang LYC Bearing Corporation, Henan Luoyang 471023, China |
| YE Jun | School of Mechatronics Engineering,Henan Key Laboratory for Machinery Design and Transmission System, School of Materials Science and Engineering, Henan University of Science and Technology, Henan Luoyang 471003, China |
| LI Ji-wen | School of Mechatronics Engineering,Henan Key Laboratory for Machinery Design and Transmission System, School of Materials Science and Engineering, Henan University of Science and Technology, Henan Luoyang 471003, China |
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| 中文摘要: |
| 目的 探究Ce-Ti合金靶功率对MoS2基涂层摩擦学性能的影响，制备干摩擦性能优异的MoS2基复合涂层。方法 采用直流与射频双靶非平衡共溅射技术，通过调节Ce-Ti(1∶1)靶功率控制涂层掺杂元素含量。利用原子力显微镜(AFM)、X射线光电子能谱仪(XPS)等多种测试手段，分析合金靶功率对Ce-Ti/MoS2涂层微观组织、力学性能及摩擦学性能的影响。结果 随着掺杂金属功率提升，MoS2基涂层由明显的晶体结构变为类似非晶结构;表面由纯MoS2的蠕虫状逐渐转化为细小团聚形貌，在达到90 W功率后团聚尺寸又逐渐粗大。当Ce-Ti靶(Ce的原子数分数为2.32%;Ti的原子数分数为7.21%)沉积功率达到70 W时，致密程度显著提高，由无掺杂多孔柱状晶变为细密柱状生长结构，纳米硬度达7.85 GPa，并明显改善了氧化现象。在摩擦磨损方面，70 W功率下磨痕呈微量的磨粒磨损，平均摩擦因数低至0.073，磨损率减少至9.42× 10–8 mm3 N–1m–1。对偶钢球形成转移膜，有效减少摩擦过程剪切力。70 W条件下转移膜面积最小，且摩擦时磨痕处重组生成MoS2结构，显著减少材料的摩擦因数与磨损率。结论 磁控溅射Ce-Ti掺杂MoS2基涂层提升了涂层致密程度与摩擦磨损性能，在功率达到70 W时达到最优综合性能，涂层的摩擦因数与磨损率也因形成高质量转移膜而显著降低。 |
| 英文摘要: |
| MoS2-based self-lubricating coating of many excellent properties has broad application in aerospace and civil fields. MoS2 coating is loose and easy to be oxidized at high temperature and humidity. Since rare earth elements have the effect of inhibiting grain growth and coarsening in the material, Ti doping has been widely proven to effectively regulate the coating structure. In order to solve this problem, the effect of Ce-Ti alloy target power on tribological properties of MoS2-based coatings was investigated to prepare MoS2-based self-lubricating coatings with excellent dry friction properties. The effect of the power of the alloy on the microstructure, mechanical properties, and tribological properties of Ce-Ti/MoS2 coating was studied by dc and RF dual-target non-equilibrium co-sputtering technology. The doping content of the coating was controlled by adjusting the power of the Ce-Ti (1∶1) target. The composition, crystal phase structure, and microstructure of the coating were analyzed by field emission scanning electron microscopy (FESEM), energy dispersive spectroscopy (EDS), atomic force microscopy (AFM), and grazing incidence X-ray diffraction (GIXRD). The mechanical properties of the coating were tested with nano indentation apparatus. The friction and wear properties of the coating were characterized by a friction and wear testing machine, a white light interferometer, and a Raman spectrometer. The composition changes of the coating surface and wear marks were analyzed. The coating initially grew in (002) preferred orientation, accompanied by (100), (105) and (110) three growth orientation MoS2 characteristic peaks. With the increased power of the doped metal, the crystal structure of the MoS2 coating became similar to the amorphous structure. The surface changed from pure MoS2 vermicular shape to fine aggregate shape gradually, and the aggregate size became coarse after reaching 90 W power. The factor coefficient and wear rate decreased first and then increased. When the deposition power of Ce-Ti target reached 70 W (Ce:2.32 at.%, Ti:7.21 at.%), the densification of Ce-Ti target changed from undoped porous columnar crystal to fine columnar growth structure, the nano-hardness reached 7.85 Gpa, and the oxidation phenomenon was obviously improved. In terms of friction and wear, the wear mark showed micro abrasive wear at 70 W power, the average friction factor was as low as 0.073, and there was no apparent sharp increase. In the process of friction, the coating did not produce evident adhesion and plastic fracture, and the wear rate was reduced to 9.42× 10–8 mm3N–1m–1. The steel balls formed transfer films, which effectively reduced the shear force in the friction process. Under the condition of 70 W, the area of transfer film was the smallest, which slowed down the adhesion between interfaces. The MoS2 structure was reconstructed at the wear mark during friction, which significantly reduced material's friction factor and wear rate. Magnetron sputtering Ce-Ti doped MoS2 based coating improved the compactness and friction and wear performance of the coating and achieved the optimal comprehensive performance when the power was up to 70 W, and the friction factor and wear rate of the coating was significantly reduced. |
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