牛凤丽,王科荣,任闯,刘宁,朱楠楠,朱永伟.金刚石一次粒径对固结聚集体金刚石磨料垫加工性能与磨损过程的影响[J].表面技术,2023,52(6):351-360.
NIU Feng-li,WANG Ke-rong,REN Chuang,LIU Ning,ZHU Nan-nan,ZHU Yong-wei.Effect of Primary Diamond Grain Size on Lapping Performance and Wear Process of Fixed Agglomerated Diamond Abrasive Pads[J].Surface Technology,2023,52(6):351-360 |
| 金刚石一次粒径对固结聚集体金刚石磨料垫加工性能与磨损过程的影响 |
| Effect of Primary Diamond Grain Size on Lapping Performance and Wear Process of Fixed Agglomerated Diamond Abrasive Pads |
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| DOI：10.16490/j.cnki.issn.1001-3660.2023.06.031 |
| 中文关键词: 一次粒径 聚集体金刚石磨料 固结磨料垫 磨损速率 磨损机制 |
| 英文关键词:primary grain size agglomerated diamond abrasives fixed abrasive pads wear rate wear mechanism |
| 基金项目:国家自然科学基金联合基金(U20A20293) |
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| Author | Institution |
| NIU Feng-li | College of Mechanical and Electrical Engineering,Jiangsu Key Laboratory of Precision and Micro-manufacturing Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
| WANG Ke-rong | College of Mechanical and Electrical Engineering,Jiangsu Key Laboratory of Precision and Micro-manufacturing Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;Mechanical & Electrical Engineering College, Jinhua Polytechnic, Zhejiang Jinhua 321000, China |
| REN Chuang | College of Mechanical and Electrical Engineering,Jiangsu Key Laboratory of Precision and Micro-manufacturing Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
| LIU Ning | College of Mechanical and Electrical Engineering,Jiangsu Key Laboratory of Precision and Micro-manufacturing Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
| ZHU Nan-nan | College of Mechanical and Electrical Engineering,Jiangsu Key Laboratory of Precision and Micro-manufacturing Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
| ZHU Yong-wei | College of Mechanical and Electrical Engineering,Jiangsu Key Laboratory of Precision and Micro-manufacturing Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
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| 中文摘要: |
| 目的 探究金刚石颗粒的一次粒径对固结聚集体金刚石磨料垫磨损的影响规律，提高固结磨料垫的自修整、加工性能及经济耐用度。方法 选择14、8、5、1 μm等4种粒度的金刚石颗粒，采用烧结法制备聚集体金刚石磨料，并将其用于制备固结聚集体金刚石磨料垫。在CP-4抛光测试系统平台上开展研磨试验，在线获取加工过程中的力信号和摩擦因数。对比4种粒径的固结聚集体金刚石磨料垫的磨损速率、研磨比、研磨前后磨料垫的微观形貌、碎屑的形貌及尺寸分布，分析固结磨料垫的磨损过程及其演变规律。结果 随着金刚石颗粒粒径的增大，固结聚集体金刚石磨料垫的磨损速率由0.2 μm/min(金刚石颗粒为1 μm)增加到3.5 μm/min(金刚石颗粒为14 μm)，研磨比由2.02增加至14.33。大粒径(≥5 μm)的固结磨料垫研磨后，表面仍有锋利的金刚石微切削刃，研磨过程中的切向力和摩擦因素保持稳定，固结聚集体金刚石磨料垫的磨损形式以金刚石颗粒的脱落为主;超细粒径(≤1 μm)固结磨料垫表面的金刚石颗粒出现堵塞现象，并且研磨过程中的切向力和摩擦因数持续下降。结论 随着金刚石颗粒的一次粒径增大，固结聚集体金刚石磨料垫的磨损速率增加，自修整能力、材料去除能力和加工过程稳定性得到提升，进入稳定磨损期的时间缩短。 |
| 英文摘要: |
| Fixed abrasive lapping, with the advantages of high material removal rate, excellent processed surface quality, and green environmental protection, is widely used in the lapping and polishing processing of semiconductor materials and optical glass, like SiC, GaN, sapphire, AlN, BK7 glass, fused silica glass, etc. For Fixed Abrasives (FA) Pads, as the lapping tools, its wear modes and wear process mechanism determine the stability of lapping process. Diamond grain sizes directly affect the lapping performance and wear behaviors. The work aims to investigate the effect of the primary diamond grain size on the wear mechanism of Fixed Agglomerated Diamond Abrasive (FADA) pads, and to improve the self-conditioning, lapping process stability and economic durability of the pads. The diamond grains with four sizes of 14 μm, 8 μm, 5 μm, 1 μm, were selected to prepare the agglomerated diamond (AD) abrasives by sintering method. The four types of AD abrasives were used to prepare the hydrophilic resin-based FADA pads on the platen vulcanizer. The lapping tests were carried out on the CP-4 polishing platform which acquired lapping forces and friction factors during lapping process and coordinates of workpiece in Z direction. BK7 glass was selected as the workpiece with the diameter of 76.2 mm and the thickness of 5 mm. The wear rates and lapping ratios of FADA pads were calculated, the morphologies of pads before and after lapping were observed by a scanning electron microscope, and the size distribution of debris was detected by BT-2800 Dynamic Image Particle Size Analysis System. The wear process (wear thickness of pads vs material removal thickness of BK7 glass) of FADA pads was analyzed. The experimental results indicated that the wear rate of FADA pads increased from 0.2 μm/min to 3.5 μm/min when the primary diamond grain size increased from 1 μm to 14 μm. From the morphologies of FADA pads before and after lapping, the surface of FADA pads after lapping still had sharp micro-cutting-edges when the diamond grain size was above 5 μm. The main wear mode was the fallen diamond grains off the surface of FADA pads according to the SEM of debris and its size distributions. However, for the diamond grain size below 1 μm of FADA pads, the clogged diamond grains and some scratches by debris were found on the surface of FADA pads. With the increasing diamond grain size, the values of tangential force Ft and friction factor f increased. During the whole lapping process, Ft and f more and more stable except under the condition of diamond grain size below 1 μm. The wear process of FADA pads consisted of three stages, namely initial rapid wear (I), stable wear (II), and severe wear (III). For the diamond grains above 5 μm, the wear process of three FADA pads gone through the stages of I and II. Under the same material removal thickness, the larger size the diamond grains were, the smaller the wear thickness of FADA pads was and the more stable the wear processes were. However, for diamond grains below 1 μm, the FADA pad wear process gone from I to III directly. Thus, with increase of the primary grain size, the self-conditioning ability of the FADA pads, material removal ability and lapping stability were improved. In summary, selecting the appropriate diamond grain sizes not only effectively improves the material removal rate and the stability of the lapping process, but also improves the self-conditioning and economic durability of the FADA pads. In addition, the time to enter the stable wear period is shortened. |
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