何乃如,李建红,贾均红,刘宁,杨杰,梁海涛.元素扩散对Cr2O3陶瓷薄膜结构和摩擦学性能的影响[J].表面技术,2022,51(9):91-101. HE Nai-ru,LI Jian-hong,JIA Jun-hong,LIU Ning,YANG Jie,LIANG Hai-tao.Effect of Element Diffusion on Structure and Tribological Properties of Cr2O3 Ceramic Films Prepared by Multi-arc Ion Plating[J].Surface Technology,2022,51(9):91-101 |
元素扩散对Cr2O3陶瓷薄膜结构和摩擦学性能的影响 |
Effect of Element Diffusion on Structure and Tribological Properties of Cr2O3 Ceramic Films Prepared by Multi-arc Ion Plating |
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DOI:10.16490/j.cnki.issn.1001-3660.2022.09.009 |
中文关键词: 多弧离子镀 不同基材 Cr2O3薄膜 热处理 元素扩散 摩擦与磨损 |
英文关键词:multi-arc ion plating different substrates Cr2O3 film annealing element diffusion friction and wear |
基金项目:国家自然科学基金项目(51905325);中国博士后科学基金项目(2019M653525) |
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Author | Institution |
HE Nai-ru | School of Mechanical and Electrical Engineering, Shaanxi University of Science & Technology, Xi'an 710021, China |
LI Jian-hong | School of Mechanical and Electrical Engineering, Shaanxi University of Science & Technology, Xi'an 710021, China |
JIA Jun-hong | School of Mechanical and Electrical Engineering, Shaanxi University of Science & Technology, Xi'an 710021, China |
LIU Ning | Xi'an Aerospace Composites Research Institute, Xi'an 710025, China |
YANG Jie | School of Mechanical and Electrical Engineering, Shaanxi University of Science & Technology, Xi'an 710021, China |
LIANG Hai-tao | School of Mechanical and Electrical Engineering, Shaanxi University of Science & Technology, Xi'an 710021, China |
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中文摘要: |
目的 通过高温热处理,不同基材会发生不同的组织演变,研究了组织演变对基材中金属元素高温扩散的影响,从而判断其对多弧离子镀制备Cr2O3陶瓷薄膜形貌、结构以及摩擦学性能的影响。方法 利用多弧离子镀技术在不同基材表面(Inconel 718合金、IC10合金、45钢、316不锈钢)沉积Cr2O3薄膜。使用扫描电子显微镜(SEM)和冷场发射扫描电镜(FESEM)分析了基材和薄膜高温退火前后的表面形貌,并且利用EDS分析了基材和薄膜表面的元素含量变化。采用X射线衍射仪(XRD)对Cr2O3薄膜进行物相分析,使用往复摩擦磨损试验仪、三维轮廓仪以及扫描电子显微镜分析了基材和薄膜退火前后的摩擦学性能。结果 热处理后基材中的元素会扩散到其表面,Inconel 718合金、IC10合金和45钢热处理后,其摩擦因数降低。在Inconel 718合金和316不锈钢表面沉积的Cr2O3薄膜高温退火后,基材中的金属元素沿着Cr2O3薄膜晶界扩散至薄膜表面,并与大气中的O2反应形成三元氧化物。Cr2O3薄膜经1 000 ℃退火后,Inconel 718合金中的Ti元素扩散至Cr2O3薄膜表面形成类网状凸起结构,且薄膜表面形成CrTiO3和Cr2O3混合相,316不锈钢中的Mn元素扩散至Cr2O3薄膜表面形成尖晶石结构的MnCr2O4相,45钢表面上沉积的Cr2O3薄膜在850 ℃退火后薄膜表面形成以Fe元素为主的大颗粒,薄膜表面物相为Fe2O3和Cr2O3混合相,IC10合金表面上沉积的Cr2O3薄膜表面没有发现基材中的金属元素,主要物相为Cr2O3相。Cr2O3薄膜退火后摩擦因数降低至0.45左右。结论 Inconel 718合金、45钢以及316不锈钢中的金属元素扩散至薄膜表面时,其对Cr2O3薄膜的物相组成、表面形貌以及摩擦学性能有很大的影响。IC10合金表面上沉积的Cr2O3薄膜热处理后,磨损寿命较低。Inconel 718合金表面上沉积的Cr2O3薄膜具有优异的摩擦学性能。 |
英文摘要: |
The Cr2O3 ceramic films prepared by multi-arc ion plating possess a low friction coefficient, good wear resistant and oxidation resistance. Meanwhile, high temperature annealing could improve the mechanical properties of Cr2O3 films significantly. In previous work, we found that the metal elements in the substrate would diffuse to the film surface and oxidize to form a ternary metal oxide with lubricating property. Thus, in order to research the diffusion behaviours of the metal elements in the substrate, the effects of microstructure evolution of the substrates on the metal elements diffusion in high temperature, and the evolutions of morphologies, microstructure and tribological properties of the Cr2O3 films were also researched in detail. |
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