张仁杰,张振宇,李玉彪,徐光宏,崔祥祥,刘杰.304不锈钢绿色化学机械抛光[J].表面技术,2022,51(5):325-335.
ZHANG Ren-jie,ZHANG Zhen-yu,LI Yu-biao,XU Guang-hong,CUI Xiang-xiang,LIU Jie.Green Chemical Mechanical Polishing of 304 Stainless Steel[J].Surface Technology,2022,51(5):325-335 |
| 304不锈钢绿色化学机械抛光 |
| Green Chemical Mechanical Polishing of 304 Stainless Steel |
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| DOI：10.16490/j.cnki.issn.1001-3660.2022.05.033 |
| 中文关键词: 304不锈钢 化学机械抛光 绿色环保 正交试验 化学反应机理 表面粗糙度 |
| 英文关键词:304 stainless steel chemical mechanical polishing green environmental protection orthogonal test chemical reaction mechanism surface roughness |
| 基金项目: |
| 作者 | 单位 |
| 张仁杰 | 齐鲁工业大学 机械工程学院，济南 250353 |
| 张振宇 | 齐鲁工业大学 机械工程学院，济南 250353;大连理工大学，辽宁 大连 116024 |
| 李玉彪 | 大连理工大学，辽宁 大连 116024 |
| 徐光宏 | 大连理工大学，辽宁 大连 116024 |
| 崔祥祥 | 大连理工大学，辽宁 大连 116024 |
| 刘杰 | 大连理工大学，辽宁 大连 116024 |
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| Author | Institution |
| ZHANG Ren-jie | School of Mechanical Engineering, Qilu University of Technology, Jinan 250353, China |
| ZHANG Zhen-yu | School of Mechanical Engineering, Qilu University of Technology, Jinan 250353, China;Dalian University of Technology, Liaoning Dalian 116024, China |
| LI Yu-biao | Dalian University of Technology, Liaoning Dalian 116024, China |
| XU Guang-hong | Dalian University of Technology, Liaoning Dalian 116024, China |
| CUI Xiang-xiang | Dalian University of Technology, Liaoning Dalian 116024, China |
| LIU Jie | Dalian University of Technology, Liaoning Dalian 116024, China |
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| 中文摘要: |
| 目的 采用对环境友好的抛光工艺来改善304不锈钢表面抛光质量。方法 基于化学机械抛光(CMP)工艺，采用主要成分为氧化铝(Al2O3)磨料、L-苹果酸、过氧化氢(H2O2)、乳化剂OP-10、甘氨酸的绿色环保抛光液，设计并试验了pH值，H2O2、乳化剂OP-10、甘氨酸质量分数的4因素4水平CMP正交试验。采用极差法分析了4个因素对表面粗糙度和材料去除率的影响。采用电化学工作站，通过动电位极化曲线法，分析304不锈钢在不同抛光液环境下的静态腐蚀特性。通过X射线光电子能谱(XPS)，分析304不锈钢在不同抛光液环境下的表面元素和化学组分变化。结果 开发了一种不含任何强酸、强碱等危化物品的新型环保化学机械抛光液。通过绿色CMP加工，在70 μm×50 μm范围内将304不锈钢平均表面粗糙度从CMP前的7.972 nm降至0.543 nm。与之前报道的304不锈钢抛光相比，绿色CMP抛光后的表面粗糙度最低。通过正交试验，得到了绿色CMP加工的最优抛光液参数:pH = 3，0.3%H2O2，0.3%乳化剂OP-10，1.5%甘氨酸。结论 L-苹果酸与甘氨酸之间相互促进，使抛光液的腐蚀性增强;而H2O2的作用则相反，可使抛光液的氧化性增强，减缓抛光液对304不锈钢表面的腐蚀。 |
| 英文摘要: |
| Improving the surface polishing quality of 304 stainless steel by adopting an environment-friendly polishing process. In this paper, based on the chemical mechanical polishing (CMP) process, a green and environmentally friendly polishing slurry with the main components of aluminum oxide (Al2O3) abrasive, L-malic acid, hydrogen peroxide (H2O2), emulsifier OP-10 and glycine is used. A four-factor, four-level orthogonal CMP experiment was designed and tested for pH, H2O2, emulsifier OP-10, and glycine mass fraction. The effects of the four factors on surface roughness (Ra) and material removal rate were analyzed using the polar difference method. The electrochemical workstation was used to analyze the static corrosion characteristics of 304 stainless steel under different polishing slurry environments by the dynamic potential polarization curve method. Through the analysis of corrosion potential and corrosion current density, to investigate the degree of corrosion of 304 stainless steel by different polishing slurry. The changes of surface elements and chemical components of 304 stainless steel in different polishing solutions were analyzed by X-ray photoelectron spectroscopy (XPS). Through the analysis of narrow spectra of Fe 2p and O 1s, the composition changes of iron and oxygen on the surface of 304 stainless steel in different polishing solutions were explored. A new environment-friendly chemical mechanical polishing slurry without any strong acid, alkali or dangerous chemicals was developed in this paper. Through green CMP processing, the average surface roughness of 304 stainless steel was reduced from 7.972 nm before CMP to 0.543 nm. To the best of our knowledge, surface roughness after green CMP developed are the lowest on 304 stainless steel, compared with those reported previously. The optimal polishing slurry parameters for green CMP processing were obtained by orthogonal tests:pH=3, 0.3wt.% H2O2, 0.3wt.% emulsifier OP-10, 1.5wt.% glycine. XPS and electrochemical analysis show that L-malic acid and glycine promote each other and enhance the corrosiveness of the polishing slurry. On the contrary, H2O2 can enhance the oxidation of the polishing slurry and slow down the corrosion of the polishing slurry on the surface of 304 stainless steel. |
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