李昊,郑贺,李淑钰,郭鹏,孙丽丽,柯培玲,汪爱英.氮表面改性非晶碳基涂层的摩擦及腐蚀行为[J].表面技术,2022,51(5):61-69.
LI Hao,ZHENG He,LI Shu-yu,GUO Peng,SUN Li-li,KE Pei-ling,WANG Ai-ying.Effect of Nitrogen Surface Modification on Tribology and Corrosion Behavior of Amorphous Carbon Coating[J].Surface Technology,2022,51(5):61-69 |
| 氮表面改性非晶碳基涂层的摩擦及腐蚀行为 |
| Effect of Nitrogen Surface Modification on Tribology and Corrosion Behavior of Amorphous Carbon Coating |
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| DOI：10.16490/j.cnki.issn.1001-3660.2022.05.007 |
| 中文关键词: 非晶碳 摩擦 腐蚀 磁控溅射 氮掺杂 表面改性 |
| 英文关键词:amorphous carbon friction corrosion magnetron sputtering nitrogen doping surface modification |
| 基金项目:中国科学院A类战略性先导科技专项(XDA22010303);中国科学院-韩国国家科技理事会协议项目(174433KYSB20200021);王宽诚率先人才计划卢嘉锡国际团队(GJTD-2019-13);中科院创新团队(292020000008) |
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| Author | Institution |
| LI Hao | Key Laboratory of Marine Materials and Related Technologies,Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
| ZHENG He | Yongwei Group Co., Ltd., Zhejiang Ningbo 315033, China |
| LI Shu-yu | Key Laboratory of Marine Materials and Related Technologies,Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
| GUO Peng | Key Laboratory of Marine Materials and Related Technologies,Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China |
| SUN Li-li | Key Laboratory of Marine Materials and Related Technologies,Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China |
| KE Pei-ling | Key Laboratory of Marine Materials and Related Technologies,Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
| WANG Ai-ying | Key Laboratory of Marine Materials and Related Technologies,Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
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| 中文摘要: |
| 目的 在本征无氢非晶碳涂层表面进行掺N表面改性处理，研究其摩擦性能与海水腐蚀行为的演变规律，为海洋防护非晶碳涂层应用提供新思路。方法 采用直流磁控溅射固体石墨靶制备非晶碳涂层，并在顶层进行N掺杂表面改性。改变Ar/N2气流量比来控制顶层掺N量，调控沉积时间，控制涂层厚度一致。SEM用于观测涂层厚度与截面形貌，XPS和Raman光谱仪分别用于表征涂层N掺杂量和碳键结构。涂层力学性能和动态摩擦因数则通过连续刚度模式纳米压痕仪和球盘式摩擦实验机测试得到。采用含有三电极体系的Gamry电化学工作站测量涂层的动电位极化曲线、电化学交流阻抗谱等电化学性能。结果 对无氢非晶碳涂层进行表面改性，随顶层改性N含量的增加，sp2—C易与N结合，导致sp2相含量降低。随着N含量的增加，涂层的力学性能逐渐提升，当N质量分数为21%时，硬度与弹性模量达到最大值，分别为11.71 GPa和284.28 GPa;但当N质量分数最小(12%)时，涂层的断裂韧性与抗弹塑性变形能力最优。由于顶层引入掺N层后，sp2润滑相减少，涂层摩擦因数显著上升，且随N含量的增大逐渐增大。在顶层引入N掺杂量较少的改性层有利于提高非晶碳的耐蚀性，但随N含量的增大，涂层表面的孔隙增多，腐蚀溶液渗透加速，涂层的耐蚀性迅速恶化。结论 顶层少量N掺杂有利于改善非晶碳基涂层的力学性能和耐蚀性能。N含量过高时，涂层性能随着N含量的升高逐渐恶化。在海洋关键零部件表面制备微量N掺杂改性的非晶碳涂层有利于提高其防护性能。 |
| 英文摘要: |
| N-doped surface modification was carried out on the surface of intrinsic hydrogen free amorphous carbon coating, and the evolution law of its friction properties and seawater corrosion behavior was studied, which provided a new idea for the application of marine protective amorphous carbon coating. Amorphous carbon coating was prepared by DC magnetron sputtering on solid graphite target, and n-doped surface modification was carried out on the top layer. Change the Ar/N2 gas flow ratio to control the N content in the top layer, adjust the deposition time and control the coating thickness. SEM was used to characterize the coating thickness and cross-section morphology, XPS and Raman spectra were used to characterize the N-doping content and carbon bond structure of the coating, respectively. The mechanical properties and dynamic friction coefficient of the coating were measured by continuous stiffness mode nano indentation instrument and ball disc friction tester. Gamry electrochemical workstation with three electrode system was used to measure the electrochemical properties of the coating, such as potentiodynamic polarization curve and electrochemical AC impedance spectroscopy. |
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