蔡海潮,薛玉君,王景华,叶军,贺江涛.沉积压力对磁控溅射La-Ti/WS2复合薄膜结构和摩擦学性能的影响[J].表面技术,2020,49(7):168-174.
CAI Hai-chao,XUE Yu-jun,WANG Jing-hua,YE Jun,HE Jiang-tao.Effect of Deposition Pressure on Structure and Tribological Properties of La-Ti/WS2 Composite Films Prepared by Magnetron Sputtering[J].Surface Technology,2020,49(7):168-174
沉积压力对磁控溅射La-Ti/WS2复合薄膜结构和摩擦学性能的影响
Effect of Deposition Pressure on Structure and Tribological Properties of La-Ti/WS2 Composite Films Prepared by Magnetron Sputtering
投稿时间:2020-02-12  修订日期:2020-07-20
DOI:10.16490/j.cnki.issn.1001-3660.2020.07.021
中文关键词:  沉积压力  磁控溅射  La-Ti/WS2复合薄膜  摩擦系数  磨损
英文关键词:deposition pressure  magnetron sputtering  La-Ti/WS2 composite film  friction coefficient  wear
基金项目:国家国防基础科研计划项目(JCKY2018419C101);河南省科技攻关项目(202102210073)
作者单位
蔡海潮 1.河南科技大学 a.机电工程学院,河南 洛阳 471003;2.洛阳轴承研究所有限公司,河南 洛阳 471039 
薛玉君 1.河南科技大学 a.机电工程学院 b.河南省机械设计及传动系统重点实验室,河南 洛阳 471003 
王景华 2.洛阳轴承研究所有限公司,河南 洛阳 471039 
叶军 1.河南科技大学 a.机电工程学院,河南 洛阳 471003;2.洛阳轴承研究所有限公司,河南 洛阳 471039 
贺江涛 1.河南科技大学 a.机电工程学院,河南 洛阳 471003 
AuthorInstitution
CAI Hai-chao 1.a.School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003, China; 2.Luoyang Bearing Research Institute Co., Ltd, Luoyang 471039, China 
XUE Yu-jun 1.a.School of Mechatronics Engineering, b.Henan Key Laboratory for Machinery Design and Transmission System, Henan University of Science and Technology, Luoyang 471003, China 
WANG Jing-hua 2.Luoyang Bearing Research Institute Co., Ltd, Luoyang 471039, China 
YE Jun 1.a.School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003, China; 2.Luoyang Bearing Research Institute Co., Ltd, Luoyang 471039, China 
HE Jiang-tao 1.a.School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003, China 
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中文摘要:
      目的 研究不同沉积压力对磁控溅射La-Ti/WS2复合薄膜微观结构及摩擦学性能的影响。方法 采用非平衡射频磁控溅射法制备WS2薄膜和La-Ti/WS2复合薄膜。利用扫描电镜(SEM)和X射线衍射仪(XRD)对薄膜微观形貌、成分和晶向结构进行表征。用纳米压痕仪、摩擦磨损试验机和白光干涉三维形貌仪测试薄膜的力学性能和摩擦磨损性能。结果 掺杂La和Ti可以改善WS2复合薄膜的微观结构。在给定的沉积压力下,La-Ti/WS2复合薄膜均呈岛状生长模式,组织均匀,且排列较为紧凑,结构致密性好。随着沉积压力的增大,WS2(002)衍射峰向高θ值偏移,晶面间距减小,晶格发生收缩。复合薄膜的硬度和弹性模量随着沉积压力的增大,先增大后减小。沉积压力为1.2 Pa时,La-Ti/WS2复合薄膜的摩擦系数低至0.07左右,磨损率低至2.45×10–8 mm3/(N•m)。结论 沉积压力对La-Ti/WS2复合薄膜的性能有较大影响,合适的沉积压力可以提升La-Ti/WS2复合薄膜的摩擦磨损性能。
英文摘要:
      The work aims to research the effect of deposition pressure on the microstructure and tribological properties of La-Ti/WS2 composite films prepared by magnetron sputtering. La-Ti/WS2 composite films and WS2 films were prepared by unbalanced RF magnetron sputtering. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) were used to characterize the microstructure, composition and crystal structure of the films. The mechanical properties and friction and wear properties of the films were tested by nano indentation, tribometer and white light interfering profilometer. The microstructure of WS2 composite films could be improved by doping La and Ti. The La-Ti/WS2 composite films showed island like growth mode under the given deposition pressure, and the structure was uniform and compact. With the increase of deposition pressure, the diffraction peak of WS2(002) shifted to a higher value of θ, the crystal surface spacing decreased, and the crystal lattice contracted. With the increase of deposition pressure, the hardness and elastic modulus of the composite films increased first and then decreased. When the deposition pressure was 1.2 Pa, the friction coefficient of La-Ti/WS2 composite film was as low as about 0.07, and the wear rate was as low as 2.45×10–8 mm3/(N•m). The deposition pressure has a great influence on the properties of La-Ti/WS2 composite films. Appropriate deposition pressure could improve the tribological properties of La-Ti/WS2 composite films.
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