吴易谦,韦春贝,代明江,匡同春,刘敏,林松盛,石倩.沉积温度对NiCrAlY/Ag复合薄膜结构及性能的影响[J].表面技术,2019,48(12):211-217.
WU Yi-qian,WEI Chun-bei,DAI Ming-jiang,KUANG Tong-chun,LIU Min,LIN Song-sheng,SHI Qian.Effects of Deposition Temperature on Structural and Properties of NiCrAlY/Ag Composite Films[J].Surface Technology,2019,48(12):211-217 |
| 沉积温度对NiCrAlY/Ag复合薄膜结构及性能的影响 |
| Effects of Deposition Temperature on Structural and Properties of NiCrAlY/Ag Composite Films |
| 投稿时间：2019-05-31 修订日期：2019-12-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.12.025 |
| 中文关键词: 磁控溅射 NiCrAlY/Ag复合薄膜 沉积温度 摩擦系数 磨损机制 |
| 英文关键词:magnetron sputtering NiCrAlY/Ag composite films deposition temperature friction coefficient wear mechanism |
| 基金项目:中国航发创新基金项目（ZGHF-ZL-2017-C068）；广东省科学院项目（2018GDASCX-0111，2019GDASYL-0302012，2017GDASCX- 0111）；广东省科技计划项目（2017A070701027，2014B070705007） |
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| Author | Institution |
| WU Yi-qian | 1.School of Material Science and Engineering, South China University of Technology, Guangzhou 510640, China; 2.a.National Engineering Laboratory for Modern Materials Surface Engineering Technology, b.Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou 510651, China |
| WEI Chun-bei | 2.a.National Engineering Laboratory for Modern Materials Surface Engineering Technology, b.Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou 510651, China |
| DAI Ming-jiang | 2.a.National Engineering Laboratory for Modern Materials Surface Engineering Technology, b.Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou 510651, China |
| KUANG Tong-chun | 1.School of Material Science and Engineering, South China University of Technology, Guangzhou 510640, China |
| LIU Min | 2.a.National Engineering Laboratory for Modern Materials Surface Engineering Technology, b.Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou 510651, China |
| LIN Song-sheng | 2.a.National Engineering Laboratory for Modern Materials Surface Engineering Technology, b.Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou 510651, China |
| SHI Qian | 2.a.National Engineering Laboratory for Modern Materials Surface Engineering Technology, b.Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou 510651, China |
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| 中文摘要: |
| 目的 改善GH4169合金的表面性能，制备摩擦学性能优良的复合薄膜。方法 采用离子源辅助直流磁控溅射技术制备NiCrAlY/Ag复合薄膜，研究沉积温度分别为60、120、180 ℃对薄膜结构和性能的影响。利用能谱仪（EDS）、扫描电子显微镜（SEM）、原子力显微镜（AFM）、X射线衍射仪（XRD）进行薄膜元素成分含量、表面形貌、截面形貌、粗糙度和相结构的检测。采用纳米压痕仪、划痕法、球-盘式摩擦磨损试验机对薄膜的硬度、结合力、摩擦磨损性能进行分析。结果 NiCrAlY/Ag复合薄膜的表面致密度、晶粒尺寸以及表面粗糙度随沉积温度的升高而增大，物相组成主要为Ni3Al、Ag和Cr，薄膜的硬度在5.67~ 6.41 GPa之间。复合薄膜的膜/基结合力随沉积温度的增加而降低，其中沉积温度为60 ℃时的膜基结合力最佳（33.1 N），并且在此沉积温度下的复合薄膜具有最佳的室温摩擦学性能，其平均摩擦系数为0.24，磨损率为3.52×10–5 mm3/(N•m)，磨损机制为氧化磨损和磨粒磨损。结论 沉积温度对NiCrAlY/Ag复合薄膜的结构性能影响显著，当沉积温度为60 ℃时，薄膜综合性能最好。 |
| 英文摘要: |
| The work aims to prepare a composite film with good tribological properties to improve the surface properties of GH4169 alloy. NiCrAlY/Ag composite films was prepared by ion source assisted DC magnetron sputtering at 60 ℃, 120 ℃, and 180 ℃. Effects of deposition temperature on the structure and properties of films were investigated. The elemental composition, surface morphologies, cross-sectional morphologies, surface roughness, and phase structure of the films were analyzed with energy dispersive spectroscopy (EDS), scanning electron microscopy (SEM), atomic force microscopy (AFM) and X-ray diffraction (XRD). The hardness, adhesion strength, friction and wear properties of the films were analyzed with nanoindentation tester, scratch test and ball-on-disk friction and wear tester. With the increase of deposition temperature, the surface density, grain size and surface roughness of NiCrAlY/Ag composite films increased, phase structures of the films were mainly Ni3Al, Ag and Cr. The hardness of the films was slightly different at the range of 5.67~6.41 GPa. With the increase of deposition temperature, the adhesion strength of the composite films decreased. The samples deposited at 60 ℃ showed the best adhesion strength of 33.1 N, as well as good tribological properties with friction coefficient of 0.24 and wear rate of 3.52×10–5 mm3/(N•m). The wear mechanism was oxidative wear and abrasive wear. Thus the deposition temperature has a significant effect on the structural and properties of NiCrAlY/Ag composite films. The films deposited at 60 ℃ shows the best comprehensive performance. |
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