刘浩,李佳君,李震睿,徐锴,陈正佳,孙占峰,陈广超.金属粉末增强机械抛光单晶金刚石[J].表面技术,2019,48(9):321-326.
LIU Hao,LI Jia-jun,LI Zhen-rui,XU Kai,CHEN Zheng-jia,SUN Zhan-feng,CHEN Guang-chao.Mechanical Polishing Single Crystal Diamond Reinforced by Metal Powder[J].Surface Technology,2019,48(9):321-326 |
| 金属粉末增强机械抛光单晶金刚石 |
| Mechanical Polishing Single Crystal Diamond Reinforced by Metal Powder |
| 投稿时间：2018-12-23 修订日期：2019-09-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.09.039 |
| 中文关键词: 单晶金刚石 热化学抛光 金属粉末 抛光速率 粗糙度 催化活性 |
| 英文关键词:single crystal diamond thermochemical polishing metal powder polishing rate roughness catalytic activity |
| 基金项目:国家自然科学基金（50128790）；中科院百人计划；中国科学院装备计划项目（yz201356）； 河北省科技计划项目（14291110D）；北京市科技计划（Z151100003315024） |
| 作者 | 单位 |
| 刘浩 | 1.中国科学院大学，北京 100049；3.电子显微技术联合实验室，北京 101408 |
| 李佳君 | 1.中国科学院大学，北京 100049；3.电子显微技术联合实验室，北京 101408 |
| 李震睿 | 1.中国科学院大学，北京 100049；3.电子显微技术联合实验室，北京 101408 |
| 徐锴 | 1.中国科学院大学，北京 100049；3.电子显微技术联合实验室，北京 101408 |
| 陈正佳 | 1.中国科学院大学，北京 100049；3.电子显微技术联合实验室，北京 101408 |
| 孙占峰 | 2.北京中科科仪科技股份有限公司，北京 100190；3.电子显微技术联合实验室，北京 101408 |
| 陈广超 | 1.中国科学院大学，北京 100049；3.电子显微技术联合实验室，北京 101408 |
|
| Author | Institution |
| LIU Hao | 1.University of Chinese Academy of Sciences, Beijing 100049, China; 3.Joint Laboratory of Electron Microscope, Beijing 101408, China |
| LI Jia-jun | 1.University of Chinese Academy of Sciences, Beijing 100049, China; 3.Joint Laboratory of Electron Microscope, Beijing 101408, China |
| LI Zhen-rui | 1.University of Chinese Academy of Sciences, Beijing 100049, China; 3.Joint Laboratory of Electron Microscope, Beijing 101408, China |
| XU Kai | 1.University of Chinese Academy of Sciences, Beijing 100049, China; 3.Joint Laboratory of Electron Microscope, Beijing 101408, China |
| CHEN Zheng-jia | 1.University of Chinese Academy of Sciences, Beijing 100049, China; 3.Joint Laboratory of Electron Microscope, Beijing 101408, China |
| SUN Zhan-feng | 2.KYKY technology Co. Ltd, Beijing 100190, China; 3.Joint Laboratory of Electron Microscope, Beijing 101408, China |
| CHEN Guang-chao | 1.University of Chinese Academy of Sciences, Beijing 100049, China; 3.Joint Laboratory of Electron Microscope, Beijing 101408, China |
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| 中文摘要: |
| 目的 研究具有催化活性的镍、钴金属粉末对单晶金刚石机械抛光的影响，以期获得低成本高效率的单晶金刚石抛光工艺。方法 以高温高压法（HPHT）制备的Ⅱa型单晶金刚石为样品，采用机械抛光的方法沿单晶金刚石（100）晶面的[100]晶向进行抛光，抛光介质分别为金刚石研磨膏、金刚石微粉、金刚石微粉与镍粉混合粉末、金刚石微粉与钴粉混合粉末。样品表面粗糙度通过原子力显微镜（AFM）进行测定，通过扫描电镜（SEM）及能谱仪（EDS）对样品表面形貌及元素成分进行分析表征。结果 金刚石微粉作研磨粉时，抛光速率最高，达到900 μm/h，但表面粗糙度相对较差，为4.15 nm；镍粉或钴粉与金刚石微粉的混合粉末作抛光介质时，可以实现单晶金刚石的高效抛光，其中以钴粉与金刚石微粉的混合粉末作为抛光介质时的抛光效果最佳，抛光速率为875 μm/h时，表面粗糙度为1.52 nm。结论 镍、钴金属粉末与金刚石微粉混合作为抛光粉料，可以实现单晶金刚石的高效率、高质量抛光。 |
| 英文摘要: |
| The work aims to obtain low cost and high efficiency single crystal diamond polishing process by studying the influence of nickel and cobalt metal powders with catalytic activity on the mechanical polishing of single crystal diamond. IIa single crystal diamond prepared by high temperature and high pressure method (HPHT) was used as sample. The (100) plane of single crystal diamond was polished mechanically along [100] direction. The polishing media were diamond abrasive paste, diamond powder, diamond and nickel mixed powder, and diamond and cobalt mixed powder. The surface roughness of the sample was tested by atomic force microscopy (AFM). The surface morphology and elemental composition of the samples were characterized by scanning electron microscopy (SEM) and energy dispersive spectrometer (EDS). When diamond powder was used as grinding powder, the polishing rate was the highest, reaching 900 mm/h, but the surface roughness was relatively poor, 4.15 nm. When nickel powder or cobalt powder mixed with diamond powder was used as polishing medium, single crystal diamond could be polished efficiently. Among them, the best polishing medium was cobalt and diamond mixed powder. The polishing rate was 875 μm/h, and the surface roughness was 1.52 nm. From the experiment results, the high efficiency and high quality polishing of single crystal diamond can be achieved by mixing nickel or cobalt metal powder with diamond powder as polishing medium. |
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