黄志宏,杨豆,付德君,杨兵.CrC中间层碳含量对CrC/a-C∶H涂层附着力的影响[J].表面技术,2019,48(4):168-174.
HUANG Zhi-hong,YANG Dou,FU De-jun,YANG Bing.Effect of Carbon Content of CrC Interlayer on the Adhesion of CrC/a-C∶H Coatings[J].Surface Technology,2019,48(4):168-174 |
| CrC中间层碳含量对CrC/a-C∶H涂层附着力的影响 |
| Effect of Carbon Content of CrC Interlayer on the Adhesion of CrC/a-C∶H Coatings |
| 投稿时间：2019-02-20 修订日期：2019-04-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.04.024 |
| 中文关键词: CrC a-C∶H 中间层 附着力 磁控磁射 PECVD |
| 英文关键词:CrC a-C∶H interlayer adhesion magnetron sputtering PECVD |
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| 中文摘要: |
| 目的 提高氢化非晶碳涂层的附着力，研究不同碳含量的CrC中间过渡层对CrC/a-C∶H涂层附着力的影响。方法 用反应磁控溅射结合射频PECVD方法制备CrC/a-C∶H涂层，通过调节C2H2流量（0、10、20、30 mL/min）在高速钢基材上获得具有不同碳含量CrC中间层的CrC/a-C∶H涂层。用压痕法和划痕法测量涂层的附着力，并用拉曼光谱、原子力显微镜、扫描电镜和纳米压痕等方法对涂层进行表征。结果 随着中间层CrC碳含量的增加，涂层的附着力先增加后减小，当C2H2流量为20 mL/min时，CrC/a-C∶H涂层具有最大的附着力，划痕附着力为70.5 N，压痕附着力为HF1，此时涂层的硬度为23.4 GPa，表面光洁度为RMS36.9 nm。通过高斯曲线拟合拉曼图谱得到ID/IG为0.54，G峰位置在1535.9 cm-1。扫描电镜观察结果表明，CrC/a-C∶H涂层有两个明显的界面，即基材/CrC中间层界面与CrC中间层/a-C∶H顶层界面，中间层CrC为柱状晶结构，a-C∶H顶层为玻璃态。结论 CrC中间层碳含量对CrC/a-C∶H涂层的附着力有显著影响，具有合适碳含量的CrC中间层有助于提高涂层的附着力，当含碳量过高时，中间层会由晶态转变为非晶态，不利于承载来自于a-C∶H顶层的薄膜内应力，导致CrC/a-C∶H涂层附着力急剧下降。CrC/a-C∶H涂层附着失效主要发在CrC中间层/a-C∶H顶层界面。CrC中间层碳含量影响CrC/a-C∶H涂层的光洁度，相同a-C∶H涂层工艺条件下，光滑涂层具有更好的附着力。 |
| 英文摘要: |
| The work aims to improve the adhesion of hydrogenated amorphous carbon coating on substrate and study the effect of CrC interlayer with different carbon contents on the adhesion of CrC/a-C∶H coating. The CrC/a-C∶H coatings were prepared by reactive magnetron sputtering combined with RF PECVD. The C2H2 flow rate was adjusted (0, 10, 20, and 30 mL/min) to obtain CrC/a-C∶H coatings with different carbon contents in the CrC interlayer. The adhesion of the coating was measured by indentation and scratching. The coatings were characterized by Raman, AFM, SEM and Nano-indentation methods. With the increasing of the C content in the CrC interlayer, the adhesion of the coating first increased and then decreased. When the C2H2 flow rate was 20 mL/min, the CrC/a-C∶H coating had the highest adhesion force; the scratch adhesion force was 70.5 N and the indentation adhesion force was HF1. At this point, the hardness of the coating was 23.4 GPa and the RMS surface roughness was 36.9 nm. The ID/IG obtained by Gaussian curve fitting Raman map was 0.54 and the G peak position was 1535.9 cm-1. The SEM image showed that the coatings had two clear observable interfaces, the substrate/CrC interlayer interface and the CrC in-terlayer/a-C∶H top layer interface. The CrC interlayer of the CrC/a-C∶H coating was a columnar crystal structure and the top layer a-C∶H was amorphous. The carbon content of CrC interlayer has a significant effect on the adhesion of CrC/a-C∶H coating. The appropriate carbon content of CrC interlayer helps to improve the adhesion of the coating. When the carbon content is too high, the interlayer will change from crystalline to amorphous, which is not conducive to carrying the internal stress of the film from a-C∶H top layer, resulting in a sharp decline in the adhesion of CrC/a-C∶H coating. The adhesion failure of CrC/a-C∶H coating mainly occurs at the interface of CrC interlayer/a-C∶H top layer. The carbon content of the CrC interlayer affects the roughness of the CrC/a-C∶H coating. The adhesion of the coating is linearly related to the roughness. With different CrC interlayers for the same a-C∶H layer, smoother CrC/a-C∶H coatings have higher adhesion force. |
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