鲜广,范洪远,赵海波,熊计,罗粮,李之旭.梯度成分结构TiAlSiYN涂层的制备及其抗氧化性能研究[J].表面技术,2019,48(2):179-185.
XIAN Guang,FAN Hong-yuan,ZHAO Hai-bo,XIONG Ji,LUO Liang,LI Zhi-xu.Preparation of TiAlSiYN Coating with Graded-composition Structure and Its Oxidation Resistance Properties[J].Surface Technology,2019,48(2):179-185 |
| 梯度成分结构TiAlSiYN涂层的制备及其抗氧化性能研究 |
| Preparation of TiAlSiYN Coating with Graded-composition Structure and Its Oxidation Resistance Properties |
| 投稿时间：2018-09-15 修订日期：2019-02-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.02.026 |
| 中文关键词: TiAlSiYN涂层 Y元素 梯度成分结构 抗氧化性能 |
| 英文关键词:TiAlSiYN coating yttrium element graded-composition structure oxidation resistance |
| 基金项目:2017年度四川省高校重点实验室开放课题（szjj2017-060）；国家自然科学基金重点项目（51634006） |
| 作者 | 单位 |
| 鲜广 | 四川大学 a.制造科学与工程学院，成都 610065 |
| 范洪远 | 四川大学 a.制造科学与工程学院，成都 610065 |
| 赵海波 | 四川大学 b.分析测试中心，成都 610065 |
| 熊计 | 四川大学 a.制造科学与工程学院，成都 610065 |
| 罗粮 | 四川大学 a.制造科学与工程学院，成都 610065 |
| 李之旭 | 四川大学 a.制造科学与工程学院，成都 610065 |
|
| Author | Institution |
| XIAN Guang | a.School of Manufacturing Science and Engineering, Sichuan University, Chengdu 610065, China |
| FAN Hong-yuan | a.School of Manufacturing Science and Engineering, Sichuan University, Chengdu 610065, China |
| ZHAO Hai-bo | b.Analysis and Testing Centre, Sichuan University, Chengdu 610065, China |
| XIONG Ji | a.School of Manufacturing Science and Engineering, Sichuan University, Chengdu 610065, China |
| LUO Liang | a.School of Manufacturing Science and Engineering, Sichuan University, Chengdu 610065, China |
| LI Zhi-xu | a.School of Manufacturing Science and Engineering, Sichuan University, Chengdu 610065, China |
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| 中文摘要: |
| 目的 采用阴极电弧镀叠加磁控溅射的复合PVD涂层技术，实现梯度成分结构TiAlSiYN多元涂层的制备。方法 在涂层沉积过程中，通过切换不同成分的电弧靶，获得成分梯度变化的TiAlSiYN涂层。利用扫描电子显微镜及其附带能谱仪、X射线衍射仪分析涂层氧化前后的截面组织形貌、成分和物相结构。结果 在阴极电弧沉积过程中，通过磁控溅射方式植入微量Y元素会干扰涂层的生长，降低涂层的生长速率。Y元素在涂层中具有细化柱状组织的作用，并使涂层的开始氧化温度和氧化速率降低。相比于均一成分结构的TiAlSiN涂层，均一成分结构的TiAlSiYN涂层在800 ℃时表层未发生氧化。在900 ℃保温1 h后，TiAlSiYN涂层的高氧含量氮氧化物层厚度小于TiAlSiN涂层。梯度成分结构使TiAlSiYN涂层的抗氧化性能明显降低，在900 ℃保温1 h后，梯度成分结构的TiAlSiYN涂层组织完全被氧化，氧化组织以金红石结构的TiO2为主，还有少量锐钛矿结构的TiO2、SiO2和Al2O3。结论 微量稀土Y元素具有改善涂层抗氧化性的作用，而梯度成分结构不利于涂层的抗氧化性。 |
| 英文摘要: |
| The work aims to deposit the TiAlSiYN multi-component coatings with gradient composition structure by com-posite PVD coating technique combining cathodic arc plating and magnetron sputtering. In the deposition process, the TiAlSiYN coating with changing gradient compositional structure was obtained by switching the arc targets. Scanning electron microscopy and its accompanying spectrometer and X-ray diffractometer were used to analyze the cross-sectional microstructure, composition and phase structure of the coating before and after oxidation. The implantation of trace amounts of yttrium by magnetron sputtering in the process of cathodic arc deposition interfered with the growth of the coating and reduced the growth rate of the coating. Y element had the function of refining the columnar structure in the coating, and lowering the initial oxidation temperature and oxidation rate of the coating. Compared with the TiAlSiN coating with homogeneous composition, the surface of the TiAlSiYN coating with homogeneous composition was not oxidized at 800 ℃. The thickness of the high-oxygen oxynitride layer was less than that of the TiAlSiN coating after being kept at 900 ℃ for 1 h. The graded-composition structure significantly reduced the oxidation resistance of the TiAlSiYN coating. After being kept at 900 ℃ for 1 h, the TiAlSiYN coatings with graded-composition structure were completely oxidized. The oxidized structure mainly included rutile-TiO2, and a small amount of anatase-TiO2, SiO2 and Al2O3. Therefore, the rare earth element Y has an effect of improving the oxidation resistance of the coating while the gradient composition structure is detrimental to the oxidation resistance of the coating. |
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