赵莹,冯爱新,杨海华,程好.激光织构工艺对铜表面红外激光吸收率的影响[J].表面技术,2018,47(9):57-64.
ZHAO Ying,FENG Ai-xin,YANG Hai-hua,CHENG Hao.Effects of Laser Texture Process on Infrared Laser Absorptivity of Copper Surface[J].Surface Technology,2018,47(9):57-64
激光织构工艺对铜表面红外激光吸收率的影响
Effects of Laser Texture Process on Infrared Laser Absorptivity of Copper Surface
投稿时间:2018-03-09  修订日期:2018-09-20
DOI:10.16490/j.cnki.issn.1001-3660.2018.09.008
中文关键词:  红外激光吸收率  激光织构  T2紫铜  表面状态  精密加工  凹槽
英文关键词:infrared laser absorptivity  laser texture  T2 copper  surface states  precision machining  groove
基金项目:温州市激光加工与光电器件科技创新团队项目(R20170612)
作者单位
赵莹 1.温州大学,浙江 温州 325035;2.浙江省激光加工机器人重点实验室,浙江 温州 325035 
冯爱新 1.温州大学,浙江 温州 325035;2.浙江省激光加工机器人重点实验室,浙江 温州 325035 
杨海华 1.温州大学,浙江 温州 325035;2.浙江省激光加工机器人重点实验室,浙江 温州 325035 
程好 1.温州大学,浙江 温州 325035;2.浙江省激光加工机器人重点实验室,浙江 温州 325035 
AuthorInstitution
ZHAO Ying 1.School of Mechanical and Electrical Engineering, Wenzhou University, Wenzhou 325035, China;2.Key Laboratory of Laser Processing Robot of Zhejiang Province, Wenzhou 325035, China 
FENG Ai-xin 1.School of Mechanical and Electrical Engineering, Wenzhou University, Wenzhou 325035, China;2.Key Laboratory of Laser Processing Robot of Zhejiang Province, Wenzhou 325035, China 
YANG Hai-hua 1.School of Mechanical and Electrical Engineering, Wenzhou University, Wenzhou 325035, China;2.Key Laboratory of Laser Processing Robot of Zhejiang Province, Wenzhou 325035, China 
CHENG Hao 1.School of Mechanical and Electrical Engineering, Wenzhou University, Wenzhou 325035, China;2.Key Laboratory of Laser Processing Robot of Zhejiang Province, Wenzhou 325035, China 
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中文摘要:
      目的 高功率红外激光进行铜构件加工时,激光吸收率低是阻碍其工业加工、影响加工质量的重要因素,因此拟通过皮秒激光织构预处理工艺,将铜表面红外激光吸收率从低于10%提高至70%以上。方法 从改变铜表面特性着手,利用精密微细加工系统进行凹槽织构处理,通过共聚焦显微镜和扫描电镜对20%~50%激光功率、20~90次扫描次数下的织构特征进行分析,通过反射率检测仪对不同织构下铜表面的红外激光吸收率进行测试。结果 相比原始铜板,织构后铜表面红外激光吸收率有了大幅提高,且十字凹槽织构工艺下的吸收率高于同参数下的平行凹槽织构。在30%激光功率、60次扫描次数的工艺下,形成深度44 mm、间距50 mm、表面粗糙度12.15 mm、倾角75°的十字凹槽织构,铜表面红外激光吸收率达86.75%。结论 织构深度、表面粗糙度、氧化物是影响吸收率的重要因素,经过“周期性微米级织构-相爆炸喷溅颗粒物-形成黑色CuO层”三个过程,对应“光自陷织构-表面喷溅颗粒物-CuO层”三步吸收,织构工艺能够将铜表面红外激光吸收率提高近9倍。
英文摘要:
      In the process of copper parts processing by high power infrared laser, low laser absorptivity of copper surface is an important factor hindering its industrial processing and affecting processing quality. The work aims to improve infrared laser absorptivity of copper surface from less than 10% to over 70% through picosecond laser texture pretreatment. Based on changing of copper surface characteristics, precision & minuteness machining system was used to texturize the groove. Texture characteristics at 20%~50% laser power and 20~90 scanning times were analyzed by confocal microscope and scanning electron microscope. The infrared laser absorptivity of copper surface receiving different textures was tested by reflectivity detector. Compared with the original copper plate, the infrared absorptivity of textured copper surface was greatly improved. The absorptivity of copper surface with cross groove textures was higher than that with parallel groove textures under the same parameters. In the process of 30% laser power and 60 scanning times, the cross groove textures formed showed depth of 44 mm, spacing of 50 mm, surface roughness of 12.15 mm and dip angle of 75°, and infrared laser absorptivity of copper surface was up to 86.95%. Texture depth, surface roughness and oxide are three important factors affecting laser absorptivity. After the three processes of “period-ic-microscale textures-phase explosion and particles splashing-formation of black CuO layers”, corresponding to three-step ab-sorption of “light self-trapping texture-spatter particles on surface-CuO layer”, texture technology can improve the infrared laser absorptivity of copper surface by nearly 9 times.
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