王璐,金永中,林修洲,陈昌浩.基片偏压占空比对多弧离子镀TiAlSiN涂层形貌及力学性能的影响[J].表面技术,2017,46(11):237-240.
WANG Lu,JIN Yong-zhong,LIN Xiu-zhou,CHEN Chang-hao.Effects of Substrate Bias Duty Cycle on Morphology and Mechanical Properties of TiAlSiN Coating Deposited by Muti-arc Ion Plating[J].Surface Technology,2017,46(11):237-240 |
| 基片偏压占空比对多弧离子镀TiAlSiN涂层形貌及力学性能的影响 |
| Effects of Substrate Bias Duty Cycle on Morphology and Mechanical Properties of TiAlSiN Coating Deposited by Muti-arc Ion Plating |
| 投稿时间：2017-04-27 修订日期：2017-11-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2017.11.032 |
| 中文关键词: 多弧离子镀 TiAlSiN涂层 占空比 表面形貌 力学性能 |
| 英文关键词:multi-arc ion plating TiAlSiN coating duty cycle surface morphology mechanical properties |
| 基金项目:四川省青年科技创新研究团队项目（2016TD0024）；四川理工学院科研培育项目（2014PY10） |
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| Author | Institution |
| WANG Lu | School of Materials Science and Engineering, Sichuan University of Science and Engineering, Zigong 643000, China |
| JIN Yong-zhong | School of Materials Science and Engineering, Sichuan University of Science and Engineering, Zigong 643000, China |
| LIN Xiu-zhou | School of Materials Science and Engineering, Sichuan University of Science and Engineering, Zigong 643000, China |
| CHEN Chang-hao | School of Materials Science and Engineering, Sichuan University of Science and Engineering, Zigong 643000, China |
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| 中文摘要: |
| 目的 采用多弧离子镀膜技术在硬质合金基体表面沉积TiAlSiN涂层，研究占空比参数对TiAlSiN涂层的表面形貌和力学性能的影响。方法 使用扫描电子显微镜对涂层的形貌进行观察，使用自动划痕仪、纳米压痕仪对涂层的力学性能进行检测。结果 占空比在10%~70%范围内增加，离子轰击得到加强，涂层表面得到很好的改善，大颗粒与微坑缺陷数量逐渐减少。当占空比增大到90%时，大颗粒和微坑缺陷数量反而增多。结论 随着占空比的增加，纳米硬度、弹性模量和涂层结合力均先增大后减小，占空比为50%时，分别达到最大值48.15 GPa、518.24 GPa、50.55 N。 |
| 英文摘要: |
| The work aims to study effects of duty cycle parameters on surface morphology and mechanical properties of TiAlSiN coating by depositing TiAlSiN coating on the surface of cemented carbide substrate by adopting multi-arc ion plating. Morphology of the coating was observed with scanning electron microscope, and mechanical properties of the coating were detected with automatic scratch tester and nano indentation tester. With the increase of duty cycle (10%~70%), the ion bombardment was strengthened, and the coating surface was greatly improved, large particles and tiny-pit defects decreased gradually. However, large particles and tiny-pit defects increased as the duty cycle increased to 90%. Nano-hardness, elastic modulus and adhesion of the coating first increase and then decrease as the duty cycle increases, and reach the maximum value of 48.15 GPa, 518.24 GPa, 50.55 N at 50%, respectively at the duty cycle of 50%. |
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