龚鹏,范真,丁建宁,程广贵,袁宁一,凌智勇.氮化铜薄膜制备中氮气比例对其结构及微观力学性能的影响[J].表面技术,2013,42(5):15-18,31.
GONG Peng,FAN Zhen,DING Jian-ning,CHENG Guang-gui,YUAN Ning-yi,LING Zhi-yong.Effect of Nitrogen Partial Pressure on the Structure and Micro-mechanical Properties of Cu3N Films[J].Surface Technology,2013,42(5):15-18,31 |
| 氮化铜薄膜制备中氮气比例对其结构及微观力学性能的影响 |
| Effect of Nitrogen Partial Pressure on the Structure and Micro-mechanical Properties of Cu3N Films |
| 投稿时间：2013-04-25 修订日期：2013-05-17 |
| DOI： |
| 中文关键词: 氮化铜薄膜 射频磁控溅射 微结构 纳米力学 |
| 英文关键词:copper nitride thin film r. f . magnetron sputtering micro structure nano-mechanical |
| 基金项目:国家自然科学基金项目(51272033) |
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| Author | Institution |
| GONG Peng | Micro and Nano Science and Technology Research Center, Jiangsu University, Zhenjiang 212013 , China |
| FAN Zhen | Micro and Nano Science and Technology Research Center, Jiangsu University, Zhenjiang 212013 , China;School of Mechanical Engineering, Jiangsu University of Technology, Changzhou 213001 , China |
| DING Jian-ning | Micro and Nano Science and Technology Research Center, Jiangsu University, Zhenjiang 212013 , China;Center of Low-dimensional Materials Micro-nano Devices and Systems,Changzhou University, Changzhou 213164 , China |
| CHENG Guang-gui | Micro and Nano Science and Technology Research Center, Jiangsu University, Zhenjiang 212013 , China |
| YUAN Ning-yi | Center of Low-dimensional Materials Micro-nano Devices and Systems,Changzhou University, Changzhou 213164 , China |
| LING Zhi-yong | Micro and Nano Science and Technology Research Center, Jiangsu University, Zhenjiang 212013 , China |
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| 中文摘要: |
| 采用射频磁控溅射方法在玻璃基底上制备氮化铜薄膜,研究了氮氩混合气体中的氮气比例对薄膜择优生长取向、表面晶粒尺寸和微观力学性能的影响。 结果表明:低氮气比例时,薄膜的纳米力学性能比较差;随着氮气比例的增加,氮化铜薄膜的择优生长晶面从( 111 ) 晶面转变为( 100 ) 晶面,晶粒尺寸变小, 显微硬度增加,弹性模量则是先增加,后减小。 |
| 英文摘要: |
| Copper nitride thin films were prepared on silicon glass substrates by means of RF magnetron sputtering deposition, and then the effects of nitrogen partial pressure in a fixed-total N2-Ar mixture sputtering gas flow on the preferential crystalline orientation, the size of surface grain and micro-mechanical properties were investigated. It is showed that when the nitrogen partial pressure is low, the nano-mechanical property of the thin film is poor. As nitrogen partial pressure improves the preferential orientation transforms from plane (111 ) to plane (100 ) , the crystalline grain size shrinks and the elastic modulus first increases but then decreases. |
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