窦雯雯,牛玉超,黄国威,徐勇,王献忠,王孝丽,张琳琳.酸碱复合催化溶胶-凝胶法制备 SiO2减反膜及膜性能研究[J].表面技术,2013,42(1):63-66.
DOU Wen-wen,NIU Yu-chao,HUANG Guo-wei,XU Yong,WANG Xian-zhong,WANG Xiao-li,ZHANG Lin-lin.Preparation of SiO2Anti-reflective Coatings by Acid / Base Composite Catalyzed Sol-gel Method and Research on Their Properties[J].Surface Technology,2013,42(1):63-66 |
| 酸碱复合催化溶胶-凝胶法制备 SiO2减反膜及膜性能研究 |
| Preparation of SiO2Anti-reflective Coatings by Acid / Base Composite Catalyzed Sol-gel Method and Research on Their Properties |
| 投稿时间：2012-09-13 修订日期：2012-09-27 |
| DOI： |
| 中文关键词: 溶胶-凝胶 酸碱复合催化 SiO2 减反膜 透过率 表面形貌 |
| 英文关键词:Sol-gel acid / base composite catalyzed SiO2anti-reflective coating transmissivity surface morphology |
| 基金项目:山东省科技发展计划(2010G0020318) ;山东省自然科学基金( ZR2010EM062 ) ;济南市高校自主创新计划( 201004048 ) ;山东省教育厅科技计划( J12LA12) |
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| Author | Institution |
| DOU Wen-wen | School of Material Science and Engineering, Shandong Jianzhu University, Jinan 250101 , China |
| NIU Yu-chao | School of Material Science and Engineering, Shandong Jianzhu University, Jinan 250101 , China |
| HUANG Guo-wei | School of Material Science and Engineering, Shandong Jianzhu University, Jinan 250101 , China |
| XU Yong | School of Material Science and Engineering, Shandong Jianzhu University, Jinan 250101 , China |
| WANG Xian-zhong | School of Material Science and Engineering, Shandong Jianzhu University, Jinan 250101 , China |
| WANG Xiao-li | School of Material Science and Engineering, Shandong Jianzhu University, Jinan 250101 , China |
| ZHANG Lin-lin | School of Material Science and Engineering, Shandong Jianzhu University, Jinan 250101 , China |
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| 中文摘要: |
| 采用酸催化法、碱催化法和酸碱复合催化法制备了 SiO2 溶胶,进而制得 SiO2 减反膜。 表征了薄膜的表面形貌,测定了薄膜的透射率和硬度。 结果表明,不同催化溶胶制得的膜层在表面形貌、减反效果和薄膜硬度等方面存在明显差异:酸催化得到的薄膜,孔隙率和透过率最低,但硬度和抗划伤性最好;碱催化得到的薄膜,孔隙率和透过率最高,但硬度和抗划伤性最差;酸碱复合催化得到的薄膜,孔隙率、透过率、硬度和抗划伤性能介于以上二者之间,性能与酸碱复合催化溶胶的制备工艺密切相关。 |
| 英文摘要: |
| The SiO2sol and anti-reflective coatings were prepared by the acid, base, and acid / base composite catalyzed methods. The surface morphologies of coatings were characterized and their transmissivity and hardness were measured .The experiments results show that, the surface morphology, anti-reflective effect and hardness of the coatings from three sols are very different; The coating from acid-catalyzed sol has the minimum porosity, lowest transmissivity, but highest hardness and best scratch resistance; The coating from ammonia-catalyzed sol gets maximum porosity, highest transmissivity, but lowest hardness and worst scratch resistance; The properties of the coatings from acid / base composite catalyzed sol are between those of the coatings by acid and base catalyzed sol-gel process like porosity, transmissivity, hardness, and scratch resistance performance.These properties will be directly affected by acid / base composite catalyzed sol-gel process. |
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