孙维连,安广,孙铂,王会强,李新领.磁控溅射ZrN 薄膜厚度对其色度的影响[J].表面技术,2012,(2):47-49，78.
SUN Wei-lian,AN Guang,SUN Bo,WANG Hui-qiang,LI Xin-ling.Effect of Film Thickness on the Color of Magnetron Sputtering ZrN Films[J].Surface Technology,2012,(2):47-49，78 |
| 磁控溅射ZrN 薄膜厚度对其色度的影响 |
| Effect of Film Thickness on the Color of Magnetron Sputtering ZrN Films |
| 投稿时间：2011-12-05 修订日期：2012-04-20 |
| DOI： |
| 中文关键词: 沉积速率 膜层厚度 ZrN 薄膜 色度 |
| 英文关键词:deposition rate film thickness ZrN film color |
| 基金项目:河北省自然科学基金(E2009000646) |
| 作者 | 单位 |
| 孙维连 | 河北农业大学机电工程学院,保定071001 |
| 安广 | 河北农业大学机电工程学院,保定071001 |
| 孙铂 | 河北农业大学机电工程学院,保定071001 |
| 王会强 | 河北农业大学机电工程学院,保定071001 |
| 李新领 | 河北农业大学机电工程学院,保定071001 |
|
| Author | Institution |
| SUN Wei-lian | College of Mechanical and Electric Engineering, Agricultural University of Hebei, Baoding 071001, China |
| AN Guang | College of Mechanical and Electric Engineering, Agricultural University of Hebei, Baoding 071001, China |
| SUN Bo | College of Mechanical and Electric Engineering, Agricultural University of Hebei, Baoding 071001, China |
| WANG Hui-qiang | College of Mechanical and Electric Engineering, Agricultural University of Hebei, Baoding 071001, China |
| LI Xin-ling | College of Mechanical and Electric Engineering, Agricultural University of Hebei, Baoding 071001, China |
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| 中文摘要: |
| 采用中频非平衡磁控溅射技术在镜面不锈钢板上制备了ZrN 薄膜,通过改变镀膜时间控制ZrN薄膜的厚度。用色差仪测定了不同厚度ZrN 薄膜的L* ,a* 和b* 值,绘制出不同厚度ZrN 薄膜的L* ,a* 和b*值的变化曲线图,得出膜层厚度对薄膜色度的影响规律:膜层厚度低于63.7nm 时,随着膜层厚度的增加,L* 和a* 值无变化,b* 值呈线性递增,且颜色逐渐趋于金黄色;膜层厚度高于63.7nm 时,随着膜层厚度的增加,薄膜颜色坐标未有明显变化,颜色为稳定的金黄色。 |
| 英文摘要: |
| The ZrN film was prepared on the mirror stainless steel plate by using unbalanced magnetron sputtering technique. The thickness of ZrN films was controlled by changing the coating time. The L* ,a* ,b* values of the ZrN thin films with different thickness was measurea with X-rate colorimeter. The curve about the L* ,a* ,b* values of the ZrN thin films with different thickness was draw out. The color variation of the magnetron sputtering ZrN films effected by the film thickness is obtained: when film thickness is less than about 63.7 nm, with the film thickness increasing, the L* ,a* values do not change, b* values are increase by linear, and the color of the film become gold gradually; when film thickness is over about 63.7 nm, with the film thickness increasing, the chromaticity coordinates of the film has no significant change, and the color is stable gold. |
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