| CAI Hai-chao,XUE Yu-jun,WANG Jing-hua,YE Jun,HE Jiang-tao.Effect of Deposition Pressure on Structure and Tribological Properties of La-Ti/WS2 Composite Films Prepared by Magnetron Sputtering[J],49(7):168-174 |
| Effect of Deposition Pressure on Structure and Tribological Properties of La-Ti/WS2 Composite Films Prepared by Magnetron Sputtering |
| Received:February 12, 2020 Revised:July 20, 2020 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2020.07.021 |
| KeyWord:deposition pressure magnetron sputtering La-Ti/WS2 composite film friction coefficient wear |
| Author | Institution |
| CAI Hai-chao |
1.a.School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang , China; 2.Luoyang Bearing Research Institute Co., Ltd, Luoyang , China |
| XUE Yu-jun |
1.a.School of Mechatronics Engineering, b.Henan Key Laboratory for Machinery Design and Transmission System, Henan University of Science and Technology, Luoyang , China |
| WANG Jing-hua |
2.Luoyang Bearing Research Institute Co., Ltd, Luoyang , China |
| YE Jun |
1.a.School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang , China; 2.Luoyang Bearing Research Institute Co., Ltd, Luoyang , China |
| HE Jiang-tao |
1.a.School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang , China |
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| Abstract: |
| The work aims to research the effect of deposition pressure on the microstructure and tribological properties of La-Ti/WS2 composite films prepared by magnetron sputtering. La-Ti/WS2 composite films and WS2 films were prepared by unbalanced RF magnetron sputtering. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) were used to characterize the microstructure, composition and crystal structure of the films. The mechanical properties and friction and wear properties of the films were tested by nano indentation, tribometer and white light interfering profilometer. The microstructure of WS2 composite films could be improved by doping La and Ti. The La-Ti/WS2 composite films showed island like growth mode under the given deposition pressure, and the structure was uniform and compact. With the increase of deposition pressure, the diffraction peak of WS2(002) shifted to a higher value of θ, the crystal surface spacing decreased, and the crystal lattice contracted. With the increase of deposition pressure, the hardness and elastic modulus of the composite films increased first and then decreased. When the deposition pressure was 1.2 Pa, the friction coefficient of La-Ti/WS2 composite film was as low as about 0.07, and the wear rate was as low as 2.45×10–8 mm3/(N•m). The deposition pressure has a great influence on the properties of La-Ti/WS2 composite films. Appropriate deposition pressure could improve the tribological properties of La-Ti/WS2 composite films. |
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