| WEI Chun-bei,OU Wen-min,HOU Hui-jun,LIN Song-sheng,DAI Ming-jiang,SHI Qin.Structure and Properties of MoS2-Ni Composite Films Fabricated by Magnetron Sputtering Method[J],46(10):135-142 |
| Structure and Properties of MoS2-Ni Composite Films Fabricated by Magnetron Sputtering Method |
| Received:March 30, 2017 Revised:October 20, 2017 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2017.10.019 |
| KeyWord:magnetron sputtering method combined with ion source Ni doping composite films hardness adhesion frictional wear |
| Author | Institution |
| WEI Chun-bei |
National Engineering Laboratory for Modern Materials Surface Engineering Technology, the Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou , China |
| OU Wen-min |
National Engineering Laboratory for Modern Materials Surface Engineering Technology, the Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou , China |
| HOU Hui-jun |
National Engineering Laboratory for Modern Materials Surface Engineering Technology, the Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou , China |
| LIN Song-sheng |
National Engineering Laboratory for Modern Materials Surface Engineering Technology, the Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou , China |
| DAI Ming-jiang |
National Engineering Laboratory for Modern Materials Surface Engineering Technology, the Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou , China |
| SHI Qin |
National Engineering Laboratory for Modern Materials Surface Engineering Technology, the Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou , China |
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| Abstract: |
| The work aims to improve tribological properties of MoS2 film in atmosphere. MoS2-Ni composite films were fabricated in magnetron sputtering method combined with ion source. Composite films with different Ni doping contents were obtained by changing Ni target power. The effects of Ni doping content on structure and tribological properties of the composite films were studied. Microstructure and properties of the composite films were studied by using scanning electron microscope (SEM), X-ray diffractometer (XRD), microhardness tester, Rockwell hardness tester, ball-on-disc wear tester and 3D profiler. The composite films exhibited columnar crystal structure. Grains were refined and the structure was compacted as the Ni content increased. Hardness of the composite films ranged between 250~446HV and it increased as the Ni content increased. The composite films exhibited good film/substrate binding force, which might reach grade HF1. Friction coefficient of the MoS2-Ni composite films ranged between 0.10~0.23. As the Ni content increased, the wear rate reduced and friction durability increased as stable transfer film formed and stuck to the grinding ball though the friction coefficient increased. Ni doping can improve density of composite films, thus enhancing hardness, adhesion and wear resistance of the composite films. |
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