| REN Zhi-long,XIAO Jiao-yu,HUANG Jia-mu.Effects of Target Composition on Super-hydrophobic Polytetrafluoroethy-lene Films Prepared by Magnetron Sputtering[J],46(9):141-146 |
| Effects of Target Composition on Super-hydrophobic Polytetrafluoroethy-lene Films Prepared by Magnetron Sputtering |
| Received:March 25, 2017 Revised:September 20, 2017 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2017.09.022 |
| KeyWord:magnetron sputtering polytetrafluoroethylene film target transmittance super-hydrophobic |
| Author | Institution |
| REN Zhi-long |
School of Materials Science and Engineering, Chongqing University, Chongqing |
| XIAO Jiao-yu |
School of Materials Science and Engineering, Chongqing University, Chongqing |
| HUANG Jia-mu |
School of Materials Science and Engineering, Chongqing University, Chongqing |
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| Abstract: |
| The work aims to study effects of target composition on performance of magnetron sputtering PTFE films to enhance hydrophobicity of PTFE films. Transparent super-hydrophobic polytetrafluoroethylene (PTFE) films were prepared on glass substrate by one-step RF magnetron sputtering, and the effects of different PTFE targets on the films were studied. Properties of the targets and films were investigated by using X-ray photoelectron spectroscopy, Drop Meter and UV-Vis spectrophotometer. Fluorocarbon functional group content of the two targets were significantly different, and target 1 contained CF2O while target 2 did not. Target composition affected PTFE sputtering rate, that of the target 1 was 2 times as high as that of target 2. The film thickness varied with target provided with the same sputtering time, thus exhibiting different static water contact angles. Film hydrophobicity exhibited an exponential relationship with film thickness, and finally the water contact angle reached a platform of 170° and no longer rose. Meanwhile, NaF was introduced into the film as glass substrate was etched by F ions during the sputtering process. However, the content of NaF and fluorocarbon in the film was related to the target composition. The presence of NaF in the film enhanced F/C ratio, reduced surface energy, enhanced hydrophobicity, but declined visible light transmittance of the film. One-step preparation of transparent super-hydrophobic polytetrafluoroethylene film technology has extensive application prospect. Therefore, understanding the effects of target composition on film performance is of important guiding significance. |
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